Manuilenko, O., Minaeva, K., & Golota, V. (2006). Ion energy and ion angular distributions in RF capacitively coupled plasma sources: Pure argon and argon-oxygen mixtures. Вопросы атомной науки и техники.
Chicago Style (17th ed.) CitationManuilenko, O.V, K.M Minaeva, and V.I Golota. "Ion Energy and Ion Angular Distributions in RF Capacitively Coupled Plasma Sources: Pure Argon and Argon-oxygen Mixtures." Вопросы атомной науки и техники 2006.
MLA (8th ed.) CitationManuilenko, O.V, et al. "Ion Energy and Ion Angular Distributions in RF Capacitively Coupled Plasma Sources: Pure Argon and Argon-oxygen Mixtures." Вопросы атомной науки и техники, 2006.
Warning: These citations may not always be 100% accurate.