Vacuum-arc equipment for ion-plasma deposition of coatings
A brief overview of NSC KIPT developments intended for creating the process equipment for vacuum-arc deposition of coatings is presented. The equipment devised is to be adapted to large-scale manufacture conditions and to be most suitable for commercial production. Consideration is given to the deve...
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| Published in: | Вопросы атомной науки и техники |
|---|---|
| Date: | 2000 |
| Main Authors: | , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2000
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| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/82381 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Vacuum-arc equipment for ion-plasma deposition of coatings / I.I. Aksenov, V.A. Belous // Вопросы атомной науки и техники. — 2000. — № 3. — С. 156-158. — Бібліогр.: 9 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1862749706304618496 |
|---|---|
| author | Aksenov, I.I. Belous, V.A. |
| author_facet | Aksenov, I.I. Belous, V.A. |
| citation_txt | Vacuum-arc equipment for ion-plasma deposition of coatings / I.I. Aksenov, V.A. Belous // Вопросы атомной науки и техники. — 2000. — № 3. — С. 156-158. — Бібліогр.: 9 назв. — англ. |
| collection | DSpace DC |
| container_title | Вопросы атомной науки и техники |
| description | A brief overview of NSC KIPT developments intended for creating the process equipment for vacuum-arc deposition of coatings is presented. The equipment devised is to be adapted to large-scale manufacture conditions and to be most suitable for commercial production. Consideration is given to the developments of high-efficiency butt-end plasma sources, vacuum-arc evaporators with extended (cylindrical and planar) cathodes, magnetic filters for removal of macroparticles from plasma, and also a number of devices to form various-purpose coatings.
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| first_indexed | 2025-12-07T21:02:01Z |
| format | Article |
| fulltext | |
| id | nasplib_isofts_kiev_ua-123456789-82381 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1562-6016 |
| language | English |
| last_indexed | 2025-12-07T21:02:01Z |
| publishDate | 2000 |
| publisher | Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
| record_format | dspace |
| spelling | Aksenov, I.I. Belous, V.A. 2015-05-29T07:42:11Z 2015-05-29T07:42:11Z 2000 Vacuum-arc equipment for ion-plasma deposition of coatings / I.I. Aksenov, V.A. Belous // Вопросы атомной науки и техники. — 2000. — № 3. — С. 156-158. — Бібліогр.: 9 назв. — англ. 1562-6016 https://nasplib.isofts.kiev.ua/handle/123456789/82381 533.9 A brief overview of NSC KIPT developments intended for creating the process equipment for vacuum-arc deposition of coatings is presented. The equipment devised is to be adapted to large-scale manufacture conditions and to be most suitable for commercial production. Consideration is given to the developments of high-efficiency butt-end plasma sources, vacuum-arc evaporators with extended (cylindrical and planar) cathodes, magnetic filters for removal of macroparticles from plasma, and also a number of devices to form various-purpose coatings. en Національний науковий центр «Харківський фізико-технічний інститут» НАН України Вопросы атомной науки и техники Low Temperature Plasma and Plasma Technologies Vacuum-arc equipment for ion-plasma deposition of coatings Article published earlier |
| spellingShingle | Vacuum-arc equipment for ion-plasma deposition of coatings Aksenov, I.I. Belous, V.A. Low Temperature Plasma and Plasma Technologies |
| title | Vacuum-arc equipment for ion-plasma deposition of coatings |
| title_full | Vacuum-arc equipment for ion-plasma deposition of coatings |
| title_fullStr | Vacuum-arc equipment for ion-plasma deposition of coatings |
| title_full_unstemmed | Vacuum-arc equipment for ion-plasma deposition of coatings |
| title_short | Vacuum-arc equipment for ion-plasma deposition of coatings |
| title_sort | vacuum-arc equipment for ion-plasma deposition of coatings |
| topic | Low Temperature Plasma and Plasma Technologies |
| topic_facet | Low Temperature Plasma and Plasma Technologies |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/82381 |
| work_keys_str_mv | AT aksenovii vacuumarcequipmentforionplasmadepositionofcoatings AT belousva vacuumarcequipmentforionplasmadepositionofcoatings |