Vacuum-arc equipment for ion-plasma deposition of coatings

• Published in: Вопросы атомной науки и техники
• Date: 2000
• Main Authors: Aksenov, I.I., Belous, V.A.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2000
• Subjects: Low Temperature Plasma and Plasma Technologies
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/82381
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Vacuum-arc equipment for ion-plasma deposition of coatings / I.I. Aksenov, V.A. Belous // Вопросы атомной науки и техники. — 2000. — № 3. — С. 156-158. — Бібліогр.: 9 назв. — англ.

A brief overview of NSC KIPT developments intended for creating the process equipment for vacuum-arc deposition of coatings is presented. The equipment devised is to be adapted to large-scale manufacture conditions and to be most suitable for commercial production. Consideration is given to the deve...