Investigation on surface, electrical and optical properties of ITO-Ag-ITO coated glass
The aim of this work was to study the optical and electrical properties of thick ITO-Ag-ITO multilayer coating onto glass. ITO-Ag-ITO coatings with thickness of ITO layers 110 nm, 185 nm and intermediate Ag layer thickness 40 nm were prepared by magnetron sputtering. The optical, electrical and atom...
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Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2015
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| Cite this: | Investigation on surface, electrical and optical properties of ITO-Ag-ITO coated glass / Necdet Aslan1, Tuba Şen, Turgay Çoruhlu, Kenan Şentürk, Sinan Keskin, Sedat Şeker, Andrey Dobrovolskiy // Вопросы атомной науки и техники. — 2015. — № 1. — С. 256-258. — Бібліогр.: 4 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1859518987576016896 |
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| author | Aslan, Aslan Şen, Tuba Çoruhlu, Turgay Şentürk, Kenan Keskin, Sinan Şeker, Sedat Dobrovolskiy, Andrey |
| author_facet | Aslan, Aslan Şen, Tuba Çoruhlu, Turgay Şentürk, Kenan Keskin, Sinan Şeker, Sedat Dobrovolskiy, Andrey |
| citation_txt | Investigation on surface, electrical and optical properties of ITO-Ag-ITO coated glass / Necdet Aslan1, Tuba Şen, Turgay Çoruhlu, Kenan Şentürk, Sinan Keskin, Sedat Şeker, Andrey Dobrovolskiy // Вопросы атомной науки и техники. — 2015. — № 1. — С. 256-258. — Бібліогр.: 4 назв. — англ. |
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| description | The aim of this work was to study the optical and electrical properties of thick ITO-Ag-ITO multilayer coating onto glass. ITO-Ag-ITO coatings with thickness of ITO layers 110 nm, 185 nm and intermediate Ag layer thickness 40 nm were prepared by magnetron sputtering. The optical, electrical and atomic properties of the coating were examined by scanning electron microscope, atomic force microscope, X-ray diffraction analysis and ultraviolet-visible spectroscopy.
Целью работы было изучение оптических и электрических характеристик толстых ITO-Ag-ITO многослойных покрытий на стекле. ITO-Ag-ITO-покрытия с толщиной ITO-слоев 110, 185 нм и промежуточным слоем Ag толщиной 40 нм были изготовлены с помощью магнетронного напыления. Оптические, электрические и атомные характеристики были исследованы с помощью сканирующего электронного микроскопа, атомного силового микроскопа, рентгеновского дифракционного анализа и оптической спектроскопии.
Метою роботи було вивчення оптичних та електричних характеристик товстих ITO-Ag-ITO багатошарових покриттів на склі. ITO-Ag-ITO-покриття з товщиною ITO-шарів 110 і 185 нм та проміжним шаром Ag товщиною 40 нм було виготовлено за допомогою магнетронного напилення. Оптичні, електричні та атомні характеристики такого покриття були досліджені із застосуванням скануючого електронного мікроскопа, атомного силового мікроскопа, рентгенівського дифракційного аналізу та оптичної спектроскопії.
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ISSN 1562-6016. ВАНТ. 2015. №1(95)
256 PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY. 2015, № 1. Series: Plasma Physics (21), p. 256-258.
INVESTIGATION ON SURFACE, ELECTRICAL AND OPTICAL
PROPERTIES OF ITO-AG-ITO COATED GLASS
Necdet Aslan
1
, Tuba Şen
1
, Turgay Çoruhlu
1
, Kenan Şentürk
2
, Sinan Keskin
3
,
Sedat Şeker
4
, Andrey Dobrovolskiy
5
1
Yeditepe University, Physics Department, Istanbul, Turkey;
2
Beykent University, Energy Systems Engineering Department, Istanbul, Turkey;
3
Marmara University, Environmental Engineering Department, Istanbul, Turkey;
4
Gebze Institute of Technology, Materials Science & Engineering Department, Istanbul, Turkey;
5
Institute of Physics, Kyiv, Ukraine
The aim of this work was to study the optical and electrical properties of thick ITO-Ag-ITO multilayer coating onto
glass. ITO-Ag-ITO coatings with thickness of ITO layers 110 nm, 185 nm and intermediate Ag layer thickness 40 nm
were prepared by magnetron sputtering. The optical, electrical and atomic properties of the coating were examined by
scanning electron microscope, atomic force microscope, X-ray diffraction analysis and ultraviolet-visible spectroscopy.
PACS: 78.20.-e, 78.66.Sq.
INTRODUCTION
Indium tin oxide (ITO) films, which are transparent and
conductive, have attracted a growing interest in many
industrial devices, such as solar cells, liquid crystal
displays, and organic light emitting diodes due to their
low resistance and high optical transparency in the visible
region of spectrum. However, their resistivity is rather
high in some cases for improved practical applications,
particularly, at their use as a transparent electrode of a
color filter in the case of an improved display panels.
One of the ways of resistivity reduction of transparent
conductive electrodes is the use of thin metal films in
combination with ITO [1-3]. However, optical and
electrical features of such multilayer films essentially
depend on their structure. Used metal films should have a
continuous structure and high transmittance. Otherwise,
presence of island structures in the film body can lead to
both resistivity increase and transmittance decrease. One
of the most suitable metals is Ag due to its high
conductivity, and good transmittance of thin Ag films in
visible spectrum range.
The aim of this work was to study the optical and
electrical properties of thick ITO-Ag-ITO multiplayer
coating. ITO-Ag-ITO coatings with thickness of ITO
layers 110, 185 nm and intermediate Ag layer thickness
40 nm have been prepared by magnetron sputtering.
1. EXPERIMENTAL PART
1.1. MATERIALS AND METHODS
Glass microscope slides (RE-WA Lehmann-Schmidt,
55x25 mm) that were amorphous, transparent to visible
and near-infrared light were used in our experiments. To
prepare a clean adhesion surface, the glass slides were
washed by water and then treated by water-ethanol
solution (20%, Greenfield Ethanol Inc.) for 10 min. After
that the glass slides were cleaned by ultrasonic cleaner
(MTI Corp., USA) for 20 minutes and finally left to dry
for 10 min before sticking it to the substrate holder. The
coating materials (targets for magnetron sputtering) used
in this study were Ag, and ITO (all of 99.99% purity,
50.8 mm diameter, 4 mm thickness).
1.2. CHARACTERIZATION AND MEASUREMENT
METHODS
The film thicknesses on glass coatings were measured
(by Dektak Profilometer, Germany); cross sections of the
films were examined in the SEM images.
In order to examine the optical properties of the ITO-
Ag-ITO coating, a 50 W halogen lamp (producing a
continuous light intensity between 300…900 nm) and the
BAKI spectrometer (BEAM Ar-Ge Optic, Laser
Technologies Ltd, Turkey) were used.
The AFM measurements were carried out by the AFM
machine (Park systems, USA).
The X ray diffraction (XRD) measurements were
established by Rigaku D-Max/2200 PC model system.
The measurements were carried out at 40 kV and 40 mA
with 2 degrees scanning/minutes.
At studies of the features of obtained films, energy
dispersive X ray (EDX) analysis and scanning electron
microscopy (SEM) (Tescan, Mira/LMU Schottky) were
also used.
The conductivity tests on the coated glass surface
were done by four probe method (4 channel digitizing
oscilloscope from TEKTRONIX TDS 510A).
2. RESULTS AND DISCUSSION
One of the problems arising at the way of creating high-
quality uniform coatings is ITO cluster formation during
the coating. Due to that, at creation of multiplayer ITO-
Ag-ITO coating by magnetron sputtering method
especially great attention was paid to operation mode
choice, particularly, the coating time. It was determined
that the average cross section diameters of these clusters
increased from 200 to 400 nm after 5 and 25 min of
coating (Fig. 1). The film thickness was found to change
from150 nm (for 5 min) to 350 nm (for 25 min). It was
found that the coating thickness increased linearly with
the coating time. This cluster formation can be reduced
after annealing in a temperature range of 200…300
o
C. It
should be also noted that the EDX analysis of these
clusters and flat regions between clusters showed
identical results, so that the atoms in flat regions and
those in clusters are the same.
ISSN 1562-6016. ВАНТ. 2015. №1(95) 257
a
b
c
Fig. 1. The SEM pictures (x20K magnification) ITO
coating onto glass for different exposition times:
5 min (a); 15 min (b); 25 min (c)
Layers of 1
st
ITO, Ag and top ITO were deposited
stepwise for both surface morphology control and
convenience of performing optical measurements (Fig. 2).
The film thickness of the first ITO layer (21 min. coating)
was measured to be 110 nm and the Ag and final ITO
layer thicknesses were measured to be 40 nm and 185 nm,
respectively. Fig. 3 shows the SEM images of these
coatings taken at the points a-c, as shown in Fig. 2.
Fig. 2. The multilayer coating of ITO-Ag-ITO onto
microscope slide glass
As one can see from this Figure, initial ITO coating
produces clusters, Ag coating smoothes the surface, but the
clusters at final ITO coating become larger. Similar
clustering formation has been also previously observed [4].
a b c
Fig. 3. The SEM pictures (x75K magnification) ITO-Ag-
ITO coating on microscope slide:
First ITO coating (a); Ag coating onto first ITO (b);
top ITO coating onto Ag (c)
At creation of such multilayer coating, the structure of
single layers was also controlled. Fig. 4 shows the single
ITO coating side view SEM picture of 75K magnification.
One can see from the figure that deposited ITO layer has
regular columnar structure.
Fig. 4. The SEM pictures (x75K magnification) of cross
section of glass- ITO film coated for 12 minutes
Morphological feature of this ITO thin film was also
monitored using atomic force microscopy (AFM) (Fig. 5).
One can see from the Figure that the surface of deposited
layer is smooth enough – its roughness does not exceed
several tens of nanometers.
Fig. 5. The AFM image of single 84 nm thickness layer of
ITO coating
Results of researching the transmission of created
multilayer ITO-Ag-ITO coating in 400 to 900 nm range
1
st
ITO layer a
Glass
Top ITO layer
Ag layer
b
c
nm84
258 ISSN 1562-6016. ВАНТ. 2015. №1(95)
are presented in Fig. 6. Deposition of the first ITO layer
with 110 nm thickness practically has no influence on
transmission spectrum of the film, whereas adding 40 nm
thick Ag layer leads to transmission decrease in visible
range by almost 30% (transmission minimum is located at
about 650 nm wavelength). Adding top 185 nm thick ITO
layer does not change the transmission value in
400…650 nm range, but decreases it at longer
wavelengths. Such behavior of transmission spectrum
differs from data presented in [3], where transmission
spectrum is bell-shaped (with the transmission maximum
at 600 nm) at Ag layer thickness variation from 10 to
20 nm.
400 500 600 700 800 900
0,0
0,2
0,4
0,6
0,8
1,0
visible range
Tr
an
sm
itt
an
ce
Wavelength, nm
Glass+ITO/Glass
Glass+ITO+Ag/Glass
Glass+ITO+Ag+ITO/Glass
Fig. 6. The transmittance spectra for-ITO-Ag-ITO
multiplayer consisting of 110 nm thick ITO, 40 nm Ag and
185 nm ITO
Clarification of a reason of such discrepancy is planned in
subsequent researches.
The resistances of ITO monolayer and ITO-Ag-ITO
multilayer structures deposited on the glass slide by
magnetron sputtering was measured by 4-probe method,
and it was found that the resistance of ITO-Ag-ITO
(measured from top) reduces to only 1 from initial ITO
resistance of nearly 70 . The low resistance is due to
the immersion of Ag layer between the ITO layers. It
should be noted that, owing to light transmittance
reduction with the increase of Ag coating thickness, it is
important to carefully adjust Ag thickness, if ITO layers
are to be used for optical purposes.
CONCLUSIONS
The optical, electrical and atomic properties of
multilayer ITO-Ag-ITO coating were examined by SEM,
AFM and XRD analysis. It was measured that the average
cross section diameters of these clusters increased from
200 to 400 nm after 5 and 25 min of coating. The film
thickness of the first ITO layer (21 min coating) in ITO-
Ag-ITO coating was measured to be 110 nm and the Ag
and final ITO layer thicknesses were measured to be 40
nm and 185 nm respectively. It was found that the sheet
resistance of ITO-Ag-ITO (measured from top) reduces to
only 1 from initial ITO resistance of nearly 70
ohms. The low sheet resistance is due to the immersion of
Ag layer between the ITO layers.
ACKNOWLEDGEMENTS
This work was partially supported by Yeditepe
University, İstanbul-Turkey and by joint TÜBİTAK (The
Scientific and Technological Research Council of Turkey)
and National Academy of Sciences of Ukraine (NASU)
project number 110T578.
REFERENCES
1. K.H. Choia, J.Y. Kima, Y.S. Leeb, H.J. Kima.
ITO/Ag/ITO multilayer films for the application of a very
low resistance transparent electrode // Thin Solid Films.
1999, v. 341, p. 152-155.
2. C. Guille´n, J. Herrero. ITO/metal/ITO multilayer
structures based on Ag and Cu metal films for high-
performance transparent electrodes// Solar Energy
Materials & Solar Cells. 2008, v. 92, p. 938-941.
3. C. Guillen, J. Herrero. Transparent conductive
ITO/Ag/ITO multilayer electrodes deposited by sputtering
at room temperature// Optics Communications. 2009,
v. 282, p. 574-578.
4. A. Klöppela, W. Kriegseisa, B.K. Meyera, et al.
Dependence of the electrical and optical behaviour of
ITO-silver-ITO multilayers on the silver properties// Thin
Solid Films. 2000, v. 365, № 1, p. 139-146.
Article received 10.11.2014
ИССЛЕДОВАНИЕ ПОВЕРХОСТНЫХ, ЭЛЕКТРИЧЕСКИХ И ОПТИЧЕСКИХ ХАРАКТЕРИСТИК
ITO-Ag-ITO-ПОКРЫТИЙ НА СТЕКЛЕ
Necdet Aslan, Tuba Şen, Turgay Çoruhlu, Kenan Şentürk, Sinan Keskin, Sedat Şeker, Andrey Dobrovolskiy
Целью работы было изучение оптических и электрических характеристик толстых ITO-Ag-ITO
многослойных покрытий на стекле. ITO-Ag-ITO-покрытия с толщиной ITO-слоев 110, 185 нм и
промежуточным слоем Ag толщиной 40 нм были изготовлены с помощью магнетронного напыления.
Оптические, электрические и атомные характеристики были исследованы с помощью сканирующего
электронного микроскопа, атомного силового микроскопа, рентгеновского дифракционного анализа и
оптической спектроскопии.
ДОСЛІДЖЕННЯ ПОВЕРХНЕВИХ, ЕЛЕКТРИЧНИХ ТА ОПТИЧНИХ ХАРАКТЕРИСТИК
ITO- Ag -ITO-ПОКРИТТІВ НА СКЛІ
Necdet Aslan, Tuba Şen, Turgay Çoruhlu, Kenan Şentürk, Sinan Keskin, Sedat Şeker, Andrey Dobrovolskiy
Метою роботи було вивчення оптичних та електричних характеристик товстих ITO-Ag-ITO
багатошарових покриттів на склі. ITO-Ag-ITO-покриття з товщиною ITO-шарів 110 і 185 нм та проміжним
шаром Ag товщиною 40 нм було виготовлено за допомогою магнетронного напилення. Оптичні, електричні та
атомні характеристики такого покриття були досліджені із застосуванням скануючого електронного
мікроскопа, атомного силового мікроскопа, рентгенівського дифракційного аналізу та оптичної спектроскопії.
|
| id | nasplib_isofts_kiev_ua-123456789-82406 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1562-6016 |
| language | English |
| last_indexed | 2025-11-25T20:53:18Z |
| publishDate | 2015 |
| publisher | Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
| record_format | dspace |
| spelling | Aslan, Aslan Şen, Tuba Çoruhlu, Turgay Şentürk, Kenan Keskin, Sinan Şeker, Sedat Dobrovolskiy, Andrey 2015-05-29T09:08:39Z 2015-05-29T09:08:39Z 2015 Investigation on surface, electrical and optical properties of ITO-Ag-ITO coated glass / Necdet Aslan1, Tuba Şen, Turgay Çoruhlu, Kenan Şentürk, Sinan Keskin, Sedat Şeker, Andrey Dobrovolskiy // Вопросы атомной науки и техники. — 2015. — № 1. — С. 256-258. — Бібліогр.: 4 назв. — англ. 1562-6016 PACS: 78.20.-e, 78.66.Sq. https://nasplib.isofts.kiev.ua/handle/123456789/82406 The aim of this work was to study the optical and electrical properties of thick ITO-Ag-ITO multilayer coating onto glass. ITO-Ag-ITO coatings with thickness of ITO layers 110 nm, 185 nm and intermediate Ag layer thickness 40 nm were prepared by magnetron sputtering. The optical, electrical and atomic properties of the coating were examined by scanning electron microscope, atomic force microscope, X-ray diffraction analysis and ultraviolet-visible spectroscopy. Целью работы было изучение оптических и электрических характеристик толстых ITO-Ag-ITO многослойных покрытий на стекле. ITO-Ag-ITO-покрытия с толщиной ITO-слоев 110, 185 нм и промежуточным слоем Ag толщиной 40 нм были изготовлены с помощью магнетронного напыления. Оптические, электрические и атомные характеристики были исследованы с помощью сканирующего электронного микроскопа, атомного силового микроскопа, рентгеновского дифракционного анализа и оптической спектроскопии. Метою роботи було вивчення оптичних та електричних характеристик товстих ITO-Ag-ITO багатошарових покриттів на склі. ITO-Ag-ITO-покриття з товщиною ITO-шарів 110 і 185 нм та проміжним шаром Ag товщиною 40 нм було виготовлено за допомогою магнетронного напилення. Оптичні, електричні та атомні характеристики такого покриття були досліджені із застосуванням скануючого електронного мікроскопа, атомного силового мікроскопа, рентгенівського дифракційного аналізу та оптичної спектроскопії. This work was partially supported by Yeditepe University, İstanbul-Turkey and by joint TÜBİTAK (The Scientific and Technological Research Council of Turkey) and National Academy of Sciences of Ukraine (NASU) project number 110T578. en Національний науковий центр «Харківський фізико-технічний інститут» НАН України Вопросы атомной науки и техники Низкотемпературная плазма и плазменные технологии Investigation on surface, electrical and optical properties of ITO-Ag-ITO coated glass Исследование поверхостных, электрических и оптических характеристик ITO-Ag-ITO-покрытий на стекле Дослідження поверхневих, електричних та оптичних характеристик ITO- Ag -ITO-покриттів на склі Article published earlier |
| spellingShingle | Investigation on surface, electrical and optical properties of ITO-Ag-ITO coated glass Aslan, Aslan Şen, Tuba Çoruhlu, Turgay Şentürk, Kenan Keskin, Sinan Şeker, Sedat Dobrovolskiy, Andrey Низкотемпературная плазма и плазменные технологии |
| title | Investigation on surface, electrical and optical properties of ITO-Ag-ITO coated glass |
| title_alt | Исследование поверхостных, электрических и оптических характеристик ITO-Ag-ITO-покрытий на стекле Дослідження поверхневих, електричних та оптичних характеристик ITO- Ag -ITO-покриттів на склі |
| title_full | Investigation on surface, electrical and optical properties of ITO-Ag-ITO coated glass |
| title_fullStr | Investigation on surface, electrical and optical properties of ITO-Ag-ITO coated glass |
| title_full_unstemmed | Investigation on surface, electrical and optical properties of ITO-Ag-ITO coated glass |
| title_short | Investigation on surface, electrical and optical properties of ITO-Ag-ITO coated glass |
| title_sort | investigation on surface, electrical and optical properties of ito-ag-ito coated glass |
| topic | Низкотемпературная плазма и плазменные технологии |
| topic_facet | Низкотемпературная плазма и плазменные технологии |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/82406 |
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