The effects of nitrogen atmosphere pressure, constant and high-voltage pulse potentials of the substrate on the structure and properties of vacuum-arc ZrN coatings

• Published in: Вопросы атомной науки и техники
• Date: 2015
• Main Authors: Sobol’, O.V., Andreev, A.A., Stolbovoy, V.A., Gorban’, V.F., Pinchuk, N.V., Meylekhov, A.A.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2015
• Subjects: Физика радиационных и ионно-плазменных технологий
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/82450
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: The effects of nitrogen atmosphere pressure, constant and high-voltage pulse potentials of the substrate on the structure and properties of vacuum-arc ZrN coatings / O.V. Sobol’, A.A. Andreev, V.A. Stolbovoy, V.F. Gorban’, N.V. Pinchuk, A.A. Meylekhov // Вопросы атомной науки и техники. — 2015. — № 2. — С. 105-110. — Бібліогр.: 15 назв. — англ.

ZrN-phase coatings with a cubic lattice (NaCl structure type) were produced by the method of vacuum-arc evaporation of a Zr cathode in nitrogen atmosphere at pressures PN between 0.02 and 0.64 Pa. The pressure increase at a bias potential of -150 V leads to formation of the growth texture [111] or t...