Magnetron with a concave hemispherical cathode
A magnetron set up with a hemispherical concave cathode has been worked out for the first time. The cathode center of curvature was registered with the sputtered surface. An aluminum nitride film was sputtered by this magnetron in the pulse regime. The pulse duration was about 2 ms. The film thick...
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| Published in: | Вопросы атомной науки и техники |
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| Date: | 2009 |
| Main Authors: | , , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2009
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| Subjects: | |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/88319 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Magnetron with a concave hemispherical cathode / B.V. Stetsenko, A.I. Shchurenko, Yu.G. Zavyalov // Вопросы атомной науки и техники. — 2009. — № 1. — С. 134-135. — Бібліогр.: 8 назв. — англ. |