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Synthesis of Ti-Si and Ti-Si-N coatings by condensation of filtered vacuum-arc plasma

Synthesis of Ti-Si and Ti-Si-N coatings using a filtered vacuum-arc plasma source with consumable titaniumsilicon cathode was investigated. The thickness of films and their elemental composition were defined by means of the X-ray fluorescent analysis. It has been established, that...

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Veröffentlicht in:	Вопросы атомной науки и техники
Datum:	2009
Hauptverfasser:	Aksyonov, D.S., Aksenov, I.I., Luchaninov, A.A., Reshetnyak, E.N., Strel’nitskij, V.E.
Format:	Artikel
Sprache:	Englisch
Veröffentlicht:	Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2009
Schlagworte:	Физика и технология конструкционных материалов
Online Zugang:	https://nasplib.isofts.kiev.ua/handle/123456789/90791
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!
Назва журналу:	Digital Library of Periodicals of National Academy of Sciences of Ukraine
Zitieren:	Synthesis of Ti-Si and Ti-Si-N coatings by condensation of filtered vacuum-arc plasma / D.S. Aksyonov, I.I. Aksenov, A.A. Luchaninov, E.N. Reshetnyak, V.E. Strel’nitskij // Вопросы атомной науки и техники. — 2009. — № 6. — С. 268-272. — Бібліогр.: 4 назв. — рос.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine

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