Synthesis of Ti-Si and Ti-Si-N coatings by condensation of filtered vacuum-arc plasma

• Veröffentlicht in: Вопросы атомной науки и техники
• Datum: 2009
• Hauptverfasser: Aksyonov, D.S., Aksenov, I.I., Luchaninov, A.A., Reshetnyak, E.N., Strel’nitskij, V.E.
• Format: Artikel
• Sprache: English
• Veröffentlicht: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2009
• Schlagworte: Физика и технология конструкционных материалов
• Online Zugang: https://nasplib.isofts.kiev.ua/handle/123456789/90791
• Назва журналу: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Zitieren: Synthesis of Ti-Si and Ti-Si-N coatings by condensation of filtered vacuum-arc plasma / D.S. Aksyonov, I.I. Aksenov, A.A. Luchaninov, E.N. Reshetnyak, V.E. Strel’nitskij // Вопросы атомной науки и техники. — 2009. — № 6. — С. 268-272. — Бібліогр.: 4 назв. — рос.

Synthesis of Ti-Si and Ti-Si-N coatings using a filtered vacuum-arc plasma source with consumable titaniumsilicon cathode was investigated. The thickness of films and their elemental composition were defined by means of the X-ray fluorescent analysis. It has been established, that the silicon conc...