APA (7th ed.) Citation

Bizyukov, A., Bizyukov, I., Girka, O., Sereda, K., Sleptsov, V., Gutkin, M., & Mishin, S. (2011). Ion beam system for nanotrimming of functional microelectronics layers. Вопросы атомной науки и техники.

Chicago Style (17th ed.) Citation

Bizyukov, A.A, I.A Bizyukov, O.I Girka, K.N Sereda, V.V Sleptsov, M. Gutkin, and S. Mishin. "Ion Beam System for Nanotrimming of Functional Microelectronics Layers." Вопросы атомной науки и техники 2011.

MLA (8th ed.) Citation

Bizyukov, A.A, et al. "Ion Beam System for Nanotrimming of Functional Microelectronics Layers." Вопросы атомной науки и техники, 2011.

Warning: These citations may not always be 100% accurate.