Erosion of vacuum-arc TiN coatings in plasma of stationary magnetron-type discharges
Studies were made into erosion of titanium nitride coatings deposited onto stainless steel substrates in two different
 ways of vacuum-arc technology: with and without feeding high-voltage negative pulses on the substrate. A possible
 physical mechanism is offered and discussed to ex...
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| Опубліковано в: : | Вопросы атомной науки и техники |
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| Дата: | 2011 |
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Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2011
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| Цитувати: | Erosion of vacuum-arc TiN coatings in plasma of stationary magnetron-type discharges / G.P. Glazunov, A.A. Andreev, M.N. Bondarenko, A.L. Konotopskiy, V.A. Stolbovoy // Вопросы атомной науки и техники. — 2011. — № 1. — С. 116-118. — Бібліогр.: 8 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1860072528664330240 |
|---|---|
| author | Glazunov, G.P. Andreev, A.A. Bondarenko, M.N. Konotopskiy, A.L. Stolbovoy, V.A. |
| author_facet | Glazunov, G.P. Andreev, A.A. Bondarenko, M.N. Konotopskiy, A.L. Stolbovoy, V.A. |
| citation_txt | Erosion of vacuum-arc TiN coatings in plasma of stationary magnetron-type discharges / G.P. Glazunov, A.A. Andreev, M.N. Bondarenko, A.L. Konotopskiy, V.A. Stolbovoy // Вопросы атомной науки и техники. — 2011. — № 1. — С. 116-118. — Бібліогр.: 8 назв. — англ. |
| collection | DSpace DC |
| container_title | Вопросы атомной науки и техники |
| description | Studies were made into erosion of titanium nitride coatings deposited onto stainless steel substrates in two different
ways of vacuum-arc technology: with and without feeding high-voltage negative pulses on the substrate. A possible
physical mechanism is offered and discussed to explain the different character of erosion behavior.
Досліджено ерозію покриттів з нітриду титану, осаджених на підкладки з неіржавіючої сталі двома різними
методами вакуумно-дугової технології: з подачею і без подачі високовольтних імпульсів негативної полярності
на підкладку. Пропонується і обговорюється фізичний механізм для пояснення різного характеру ерозійної
поведінки.
Исследована эрозия покрытий из нитрида титана, осажденных на подложки из нержавеющей стали двумя
различными методами вакуумно-дуговой технологии: с подачей и без подачи высоковольтных импульсов
отрицательной полярности на подложку. Предлагается и обсуждается физический механизм для объяснения
различного характера эрозионного поведения.
|
| first_indexed | 2025-12-07T17:11:15Z |
| format | Article |
| fulltext |
EROSION OF VACUUM-ARC TiN COATINGS IN PLASMA
OF STATIONARY MAGNETRON-TYPE DISCHARGES
G.P. Glazunov, A.A. Andreev, M.N. Bondarenko, A.L. Konotopskiy, V.A. Stolbovoy
National Science Center “Kharkov Institute of Physics and Technology”, Kharkov, Ukraine
E-mail: glazunov@ipp.kharkov.ua
Studies were made into erosion of titanium nitride coatings deposited onto stainless steel substrates in two different
ways of vacuum-arc technology: with and without feeding high-voltage negative pulses on the substrate. A possible
physical mechanism is offered and discussed to explain the different character of erosion behavior.
PACS: 52.40.Hf
1. INTRODUCTION
Inasmuch as protective TiN coatings are used in the
manufacture of various components of magnetic plasma
confinement facilities Uragan-2M and Uragan-3M (IPP
NSC KIPT, Kharkov), it is necessary to know their
vacuum-plasma characteristics such as the erosion rate in
the interaction with fast particles, outgassing and sorption
in vacuum, hydrogen permeability, etc. As regards the
erosion rate, it has been previously found [1-3] that TiN
coatings have a doubtless advantage over stainless steel,
the sputtering rate of which caused by hydrogen ions is
approximately three times higher. However, those data
have been obtained at room temperature of the samples.
The literature data on the erosion rate at high
temperatures and at exposure to nitrogen plasma are
absent. At the same time, during operation of TiN-coated
units (limiters, RF antenna components, etc.) supposed to
be used in the Uragan-2M torsatron, the units will be
exposed to powerful plasma flows, including periods of
cleaning by steady-state discharges in argon, nitrogen,
helium, hydrogen, atmospheres. The working temperature
of coatings in this case may be substantially higher than
room temperature. Therefore, it has appeared expedient to
investigate the erosion behavior of TiN coatings at high
temperatures under the action of plasma. Besides,
considering that recently a new technique has appeared
for vacuum-arc TiN coating deposition through supplying
high-voltage (HV) pulses to the substrate during
sputtering [4], it became of interest to compare the
erosion characteristics of the coatings of two types
between themselves and with the ones of stainless steel.
2. EXPERIMENTAL AND RESULTS
The experiments were carried out at the DCM-1
device (bench for diagnostic of materials under plasmas
irradiation) under operating conditions of magnetron-type
cylindrical-symmetry discharge [5]. The typical discharge
parameters were as follows: magnetic field in the region
of discharge ~ 0.05 T, working gas pressure 0.2 Pa,
discharge voltage 0.4 to 1 kV, the discharge current
varied within 60 to 180 mA. The Langmuir probe was
used to measure the plasma column edge characteristics
such as electron temperature Te, electron density ne,
plasma potential ϕ.
The typical edge plasma characteristics of magnetron-
type discharges in nitrogen atmosphere were: Te ~
0.2…0.3×104 K, ne ~ 2…3×109 cm-3, ϕ ~ 7 V. The
samples presented 200×10×0.3 mm straps from stainless
steel 12Kh18N10T, on both sides of which 10…20 μm
thick titanium nitride coatings were deposited by two
different technologies: i) with feeding HV negative
potential pulses to the substrate [3], and ii) without
feeding the mentioned pulses (traditional technology [6]).
The technique of TiN coating deposition has been
described in sufficient detail in ref. [7]). The erosion rate
s (r/s·cm2) or the sputtering coefficient α (atom/ion) was
the measured parameter. Before measurements, the
samples were annealed for half an hour at temperatures
between 800 and 900°C in a special vacuum chamber at a
pressure of 5×10-7 Torr, and then were fixed as a cathode
in the DCM-1 facility. The sample temperature during
irradiation was assigned by the ion current value and
ranged from 500 to 1000°C. The erosion rate was
determined by the weight loss method with analytical
balance weighing of samples before and after plasma
treatment of the coatings, and was calculated by the
equation : α = (p1 – p2)/6.25·I·t·m, where p1 and p2 denote
the sample weight before and after irradiation,
respectively; I is the ion current (A), t is the process time
(s), m is the average atomic weight of the cathode
material (g). Figs. 1 and 2 show erosion coefficient (rate)
as a function of the ion current (temperature) for TiN
coatings of two types and stainless steel, expressed in
different units – atom/ion and g/s·cm2.
0.3
0.4
0.5
0.6
0.7
0.8
0.05 0.1 0.15 0.2
Discharge current, [ A ]
Sp
ut
te
rin
g
co
ef
fic
ie
nt
,
[a
to
m
/io
n]
stainless
steel
T iN,
without HV
pulses
T iN, with
HV pulses,
sample #1
T iN, with
HV pulses,
sample #2
T iN, with
HV pulses,
Fig. 1. Sputtering coefficient of TiN coatings and
stainless steel versus discharge current
116 PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY. 2011. № 1.
Series: Plasma Physics (17), p. 116-118.
0.0E+00
5.0E-07
1.0E-06
1.5E-06
2.0E-06
0.05 0.1 0.15 0.2
Discharge current, [ A ]
E
ro
si
on
ra
te
, [
g/
s.
сm
2 ] -Stainless steel
-TiN without HV
pulses
-TiN with HV
pulses, sample # 1
-TiN with HV
pulses, sample # 2
Fig. 2. Erosion rate (g/s·cm2) of TiN coatings and
stainless steel versus discharge current
The dependencies on discharge current for various
bombarding ions (hydrogen, helium, argon) are presented
in Fig.3.
0.01
0.1
1
0.05 0.1 0.15 0.2
Discharge current, [ A ]
Sp
ut
te
rin
g
co
ef
fic
ie
nt
,
[a
to
m
/io
n]
TiN, H-plasma
TiN, He-plasma
TiN, Ar-plasma
SS, He- plasma
Fig. 3. TiN coating sputtering coefficient versus current
values of discharges in hydrogen, helium and argon
The measured dependence of erosion on the atomic
number of bombarding ions is shown in Fig. 4. Its
character is similar to that measured earlier for tungsten
[8].
0.001
0.01
0.1
1
0 2 4 6 8 10 12 14 16 18 20
Number [ Z ]
S
pu
tte
rin
g
co
ef
fic
ie
nt
[a
t/i
on
]
65mA
90mA
110mA
130mA
150mA
180mA
Fig. 4. TiN- coating sputtering coefficient for various
discharge current versus bombarding ion atomic number Z
3. DISCUSSION
It is obvious from Figs. 1 and 2 that at high
temperatures the absolute value of erosion rate for the
TiN-coated samples is also essentially (about two times)
lower than that for the uncoated stainless steel samples,
as it has been previously observed [1] at room
temperature. Notice that it is true for the samples having
TiN coatings deposited by different technologies, i.e.,
with and without supply of high-voltage pulses. This
essential reduction in erosion of titanium nitride as
opposed to stainless steel or titanium may be attributed to
the effect of preferential sputtering of a lighter
component, namely, nitrogen. So, in paper [2] it has been
demonstrated that as early as at hydrogen ion irradiation
doses of 3×1019 cm-2 the subsurface layer of the TiN film
consists mainly of titanium.
In the 500…1000°C temperature range under study,
the sputtering (erosion) coefficient expressed in atom/ion
units is weakly dependent on the sample temperature, this
being in agreement with the earlier obtained data on
sputtering of vacuum-arc tungsten coatings [5]. This is
explained by high melting temperatures of the materials
investigated. However, if the measured data are
represented in terms of the erosion rate (g/s·cm2), then the
latter increases proportionally with the discharge current.
At the initial stage of irradiation in nitrogen plasma (in
Fig. 1, this corresponds to low discharge currents), the
sputtering coefficient of TiN films deposited with feeding
HV pulses to the substrate is 20 to 30% lower than that
for the samples prepared by the traditional technology
(without supply of HV pulses to the substrate). However,
with an increase in the irradiation dose the erosion also
increases and becomes identical for the both types of the
coatings. This result can be explained as follows. In the
experiments made previously in ref. [7] it has been
revealed that for the vacuum-arc TiN coatings there exist
two regions of outgassing with different nitrogen-binding
energies at 600°C and 800 to 900°C. At that, the coatings
obtained by the traditional technology (without pulse
supply) release more nitrogen in the first region, i.e., at
600°C, while at higher temperatures more nitrogen is
released from the coatings obtained under the conditions
with high-voltage pulses. It has been assumed [7] that the
HV pulse supply regime is favorable for an intense
capture of a greater amount of nitrogen with an enhanced
binding energy due to the presence of an additional
source of ionization. If it is so, then at the initial stage of
irradiation the mentioned coatings are more erosion
resistant in the sense that instead of titanium more
nitrogen is sputtered. As the irradiation dose increases,
owing to a selective sputtering of nitrogen, the
stoichiometric composition of the surface layer of the
coating changes (gets enriched with titanium) and the
erosion rates of the two types of coatings are practically
not different. In conclusion, we note that at a repeat
determination of the erosion rate on the samples exposed
to high (> 1020 cm-2) irradiation doses, the above-
mentioned effect is not observed at low irradiation
currents (see Fig. 1, curve +).
117
The erosion dependencies on discharge current in the
case when TiN coatings were irradiated in plasmas of
steady state discharges in other gases atmosphere,
namely: in hydrogen, helium and argon, have the same
character as for nitrogen plasma (Fig. 3). I.e., sputtering
coefficients weekly depend on discharge current value,
and its absolute value is essentially lower than that for
stainless steel.
118
4. CONCLUSIONS
Under irradiation with steady state nitrogen plasma in
the sample temperature range from 600 to 1000°C the
erosion rates of vacuum-arc TiN coatings produced by
different technologies (with and without feeding high-
voltage negative pulses to the substrate) are
approximately by a factor of 2 lower than those of
stainless steel. At the initial stage of irradiation, the
erosion coefficient of TiN films deposited with feeding
high-voltage pulses to the substrate is 20 to 30% lower
than that for the samples prepared by the traditional
technology (without supply of high-voltage pulses to the
substrate). Perhaps, this may be caused by an increased
content of nitrogen with a higher binding energy in the
coatings deposited with supply of high-voltage pulses to
the substrate. As the irradiation dose increases, the
erosion rates of the two types of coatings are practically
not different, this being most probably due to the change
in the stoichiometric composition of the TiN coating
surface caused by a selective sputtering of nitrogen.
5. REFERENCES
1. V.V. Vasil’ev, et al. // J. Nucl. Mater. 1989, v. 162-164,
p. 787-790.
2. V.S. Voitsenya, et al. // J. Nucl. Mater. 1990, v. 176-
177, p. 886-889.
3. G.P. Glazunov, et al. // J. Nucl. Mater. 2001, v. 290-
293, p. 266-270.
4. А.А. Аndreev, et al. // Physical surface engineering.
2006, v. 4, №3-4, p. 179-183 (in Russian).
5. G.P. Glazunov, et al. // Physical surface engineering.
2008, v. 6, № 1-2, p. 75-80 (in Russian).
6. I.I. Aksyonov, et al. // Ukranian Physical Journal.
1979, v. 24, p. 515 (in Russian).
7. G.P. Glazunov, et al. // Physical surface engineering.
2009, v. 7, № 4, p. 341-346 (in Russian).
8. G.P. Glazunov, et al. // Problems of Atomic Science and
Technology. Series “Plasma Physics” (14 ). 2008, N 6,
p. 107-109.
Article received 01.10.10
ЭРОЗИЯ ВАКУУМНО-ДУГОВЫХ TiN-ПОКРЫТИЙ В ПЛАЗМЕ
СТАЦИОНАРНЫХ РАЗРЯДОВ МАГНЕТРОННОГО ТИПА
Г.П. Глазунов, А.А. Андреев, M.Н. Бондаренко, А.Л. Конотопский, В.А. Столбовой
Исследована эрозия покрытий из нитрида титана, осажденных на подложки из нержавеющей стали двумя
различными методами вакуумно-дуговой технологии: с подачей и без подачи высоковольтных импульсов
отрицательной полярности на подложку. Предлагается и обсуждается физический механизм для объяснения
различного характера эрозионного поведения.
ЕРОЗІЯ ВАКУУМНО-ДУГОВИХ TiN-ПОКРИТТІВ В ПЛАЗМІ
СТАЦІОНАРНИХ РОЗРЯДІВ МАГНЕТРОННОГО ТИПУ
Г.П. Глазунов, А.А. Андрєєв, M.М. Бондаренко, O.Л. Конотопський, В.А. Столбовий
Досліджено ерозію покриттів з нітриду титану, осаджених на підкладки з неіржавіючої сталі двома різними
методами вакуумно-дугової технології: з подачею і без подачі високовольтних імпульсів негативної полярності
на підкладку. Пропонується і обговорюється фізичний механізм для пояснення різного характеру ерозійної
поведінки.
5. REFERENCES
|
| id | nasplib_isofts_kiev_ua-123456789-90894 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1562-6016 |
| language | English |
| last_indexed | 2025-12-07T17:11:15Z |
| publishDate | 2011 |
| publisher | Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
| record_format | dspace |
| spelling | Glazunov, G.P. Andreev, A.A. Bondarenko, M.N. Konotopskiy, A.L. Stolbovoy, V.A. 2016-01-05T18:29:17Z 2016-01-05T18:29:17Z 2011 Erosion of vacuum-arc TiN coatings in plasma of stationary magnetron-type discharges / G.P. Glazunov, A.A. Andreev, M.N. Bondarenko, A.L. Konotopskiy, V.A. Stolbovoy // Вопросы атомной науки и техники. — 2011. — № 1. — С. 116-118. — Бібліогр.: 8 назв. — англ. 1562-6016 PACS: 52.40.Hf https://nasplib.isofts.kiev.ua/handle/123456789/90894 Studies were made into erosion of titanium nitride coatings deposited onto stainless steel substrates in two different
 ways of vacuum-arc technology: with and without feeding high-voltage negative pulses on the substrate. A possible
 physical mechanism is offered and discussed to explain the different character of erosion behavior. Досліджено ерозію покриттів з нітриду титану, осаджених на підкладки з неіржавіючої сталі двома різними
 методами вакуумно-дугової технології: з подачею і без подачі високовольтних імпульсів негативної полярності
 на підкладку. Пропонується і обговорюється фізичний механізм для пояснення різного характеру ерозійної
 поведінки. Исследована эрозия покрытий из нитрида титана, осажденных на подложки из нержавеющей стали двумя
 различными методами вакуумно-дуговой технологии: с подачей и без подачи высоковольтных импульсов
 отрицательной полярности на подложку. Предлагается и обсуждается физический механизм для объяснения
 различного характера эрозионного поведения. en Національний науковий центр «Харківський фізико-технічний інститут» НАН України Вопросы атомной науки и техники Низкотемпературная плазма и плазменные технологии Erosion of vacuum-arc TiN coatings in plasma of stationary magnetron-type discharges Ерозія вакуумно-дугових TiN-покриттів в плазмі стаціонарних розрядів магнетронного типу Эрозия вакуумно-дуговых TiN-покрытий в плазме стационарных разрядов магнетронного типа Article published earlier |
| spellingShingle | Erosion of vacuum-arc TiN coatings in plasma of stationary magnetron-type discharges Glazunov, G.P. Andreev, A.A. Bondarenko, M.N. Konotopskiy, A.L. Stolbovoy, V.A. Низкотемпературная плазма и плазменные технологии |
| title | Erosion of vacuum-arc TiN coatings in plasma of stationary magnetron-type discharges |
| title_alt | Ерозія вакуумно-дугових TiN-покриттів в плазмі стаціонарних розрядів магнетронного типу Эрозия вакуумно-дуговых TiN-покрытий в плазме стационарных разрядов магнетронного типа |
| title_full | Erosion of vacuum-arc TiN coatings in plasma of stationary magnetron-type discharges |
| title_fullStr | Erosion of vacuum-arc TiN coatings in plasma of stationary magnetron-type discharges |
| title_full_unstemmed | Erosion of vacuum-arc TiN coatings in plasma of stationary magnetron-type discharges |
| title_short | Erosion of vacuum-arc TiN coatings in plasma of stationary magnetron-type discharges |
| title_sort | erosion of vacuum-arc tin coatings in plasma of stationary magnetron-type discharges |
| topic | Низкотемпературная плазма и плазменные технологии |
| topic_facet | Низкотемпературная плазма и плазменные технологии |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/90894 |
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