Erosion of vacuum-arc TiN coatings in plasma of stationary magnetron-type discharges

• Published in: Вопросы атомной науки и техники
• Date: 2011
• Main Authors: Glazunov, G.P., Andreev, A.A., Bondarenko, M.N., Konotopskiy, A.L., Stolbovoy, V.A.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2011
• Subjects: Низкотемпературная плазма и плазменные технологии
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/90894
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Erosion of vacuum-arc TiN coatings in plasma of stationary magnetron-type discharges / G.P. Glazunov, A.A. Andreev, M.N. Bondarenko, A.L. Konotopskiy, V.A. Stolbovoy // Вопросы атомной науки и техники. — 2011. — № 1. — С. 116-118. — Бібліогр.: 8 назв. — англ.

Studies were made into erosion of titanium nitride coatings deposited onto stainless steel substrates in two different ways of vacuum-arc technology: with and without feeding high-voltage negative pulses on the substrate. A possible physical mechanism is offered and discussed to explain the differ...