Simulating study of plasmachemical erosion of a-C:H films in a ECR discharge plasma

• Published in: Вопросы атомной науки и техники
• Date: 2011
• Main Authors: Konovalov, V.G., Makhov, M.N., Ryzhkov, I.V., Shapoval, A.N., Shtan’, A.F., Skorik, O.A., Solodovchenko, S.I., Timoshenko, A.I., Voitsenya, V.S.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2011
• Subjects: Низкотемпературная плазма и плазменные технологии
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/90955
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Simulating study of plasmachemical erosion of a-C:H films in a ECR discharge plasma / V.G. Konovalov, M.N. Makhov, I.V. Ryzhkov, A.N. Shapoval, A.F. Shtan’, O.A. Skorik, S.I. Solodovchenko, A.I. Timoshenko, V.S. Voitsenya // Вопросы атомной науки и техники. — 2011. — № 1. — С. 146-148. — Бібліогр.: 5 назв. — англ.

The dynamics of interference figure of the reflection spectrum for stainless steel and copper mirrors with specially deposited carbon-containing film (ɚ-C:H) were studied when the film was gradually eroded under impact of a deuterium plasma produced in conditions of electron cyclotron resonance (E...