Integral cluster set-up for complex compound composites syntesis
At present study the result of development and investigations of cluster technological set-up for synthesis of complex compound composites is demonstrated. The present set-up consist of complimentary DC-magnetron system, RF-inductive plasma source and ion source. The system allows to independently...
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| Published in: | Вопросы атомной науки и техники |
|---|---|
| Date: | 2011 |
| Main Authors: | Yakovin, S.D., Dudin, S.V., Zykov, A.V., Farenik, V.I. |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2011
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| Subjects: | |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/90956 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Integral cluster set-up for complex compound composites syntesis / S.D. Yakovin, S.V. Dudin, A.V. Zykov, V.I. Farenik // Вопросы атомной науки и техники. — 2011. — № 1. — С. 152-154. — Бібліогр.: 12 назв. — англ. |
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