Diagnostic system for EUV radiation measurements from dense xenon plasma generated by MPC
Magnetoplasma compressor (MPC) of compact geometry has been designed and tested as a source of EUV radiation. In present paper diagnostic system for registration of EUV radiation is described. It was applied for radiation measurements in different operation modes of MPC. The registration system wa...
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| Published in: | Вопросы атомной науки и техники |
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| Date: | 2011 |
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Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2011
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| Cite this: | Diagnostic system for EUV radiation measurements from dense xenon plasma generated by MPC / Yu.V. Petrov, I.E. Garkusha, A. Hassanein, D.G. Solyakov, A.K. Marchenko1, V.V. Chebotarev, M.S. Ladygina, V.V. Staltsov, D.V. Yelisyeyev // Вопросы атомной науки и техники. — 2011. — № 1. — С. 185-187. — Бібліогр.: 9 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1859708768676216832 |
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| author | Petrov, Yu.V. Garkusha, I.E. Hassanein, A. Solyakov, D.G. Marchenko, A.K. Chebotarev, V.V. Ladygina, M.S. Staltsov, V.V Yelisyeyev, D.V. |
| author_facet | Petrov, Yu.V. Garkusha, I.E. Hassanein, A. Solyakov, D.G. Marchenko, A.K. Chebotarev, V.V. Ladygina, M.S. Staltsov, V.V Yelisyeyev, D.V. |
| citation_txt | Diagnostic system for EUV radiation measurements from dense xenon plasma generated by MPC / Yu.V. Petrov, I.E. Garkusha, A. Hassanein, D.G. Solyakov, A.K. Marchenko1, V.V. Chebotarev, M.S. Ladygina, V.V. Staltsov, D.V. Yelisyeyev // Вопросы атомной науки и техники. — 2011. — № 1. — С. 185-187. — Бібліогр.: 9 назв. — англ. |
| collection | DSpace DC |
| container_title | Вопросы атомной науки и техники |
| description | Magnetoplasma compressor (MPC) of compact geometry has been designed and tested as a source of EUV
radiation. In present paper diagnostic system for registration of EUV radiation is described. It was applied for radiation
measurements in different operation modes of MPC. The registration system was designed on the base of combination
of different types of AXUV photodiodes. Possibility to minimize the influence of electrons and ions flows from dense
plasma stream on AXUV detector performance and results of the measurements has been discussed.
Магнітоплазмовий компресор (МПК) компактної геометрії було розроблено і випробувано у якості джерела
випромінювання ВУФ. У цій роботі описана діагностична система для реєстрації ВУФ-випромінювання.
Проведено вимірювання ВУФ- випромінювання в різних режимах роботи МПК. Система реєстрації побудована
на основі поєднання різних типів фотодіодів AXUV. Було досліджено вплив потоку електронів та іонів з плазми
на поверхню детектора, а також видимого випромінювання на результати вимірювань.
Магнитоплазменный компрессор (МПК) компактной геометрии был разработан и испытан в качестве
источника излучения ВУФ. В настоящей работе описана диагностическая система для регистрации излучения
ВУФ. Проведены измерения ВУФ-излучения в различных режимах работы МПК. Система регистрации
построена на основе сочетания различных типов фотодиодов AXUV. Было исследовано влияние потока
электронов и ионов из плазмы на поверхность детектора, а также видимого излучения на результаты
измерений.
|
| first_indexed | 2025-12-01T04:32:35Z |
| format | Article |
| fulltext |
DIAGNOSTIC SYSTEM FOR EUV RADIATION MEASUREMENTS
FROM DENSE XENON PLASMA GENERATED BY MPC
Yu.V. Petrov1, I.E. Garkusha1, A. Hassanein2, D.G. Solyakov1, A.K. Marchenko1,
V.V. Chebotarev1, M.S. Ladygina1, V.V. Staltsov1, D.V. Yelisyeyev1
1Institute of Plasma Physics, NSC “Kharkov Institute of Physics and Technology”, Kharkov, Ukraine;
2Purdue University, West Lafayette, USA
E-mail: yu_petroff@kipt.kharkov.ua
Magnetoplasma compressor (MPC) of compact geometry has been designed and tested as a source of EUV
radiation. In present paper diagnostic system for registration of EUV radiation is described. It was applied for radiation
measurements in different operation modes of MPC. The registration system was designed on the base of combination
of different types of AXUV photodiodes. Possibility to minimize the influence of electrons and ions flows from dense
plasma stream on AXUV detector performance and results of the measurements has been discussed.
PACS: 52.59.Dk, 52.70.Kz
1. INTRODUCTION
Development of powerful high-stable source of
vacuum ultraviolet radiation (EUV, λ~13.5 nm) is
important from the point of view further technological
progress in production of microelectronic components by
photolithographic method. There are several advanced
types of the devises for solution of this problem: laser
plasma systems with solid target (tin, lead, lithium),
different kinds of plasma discharge devices (z-pinches,
plasma foci and MPC systems with xenon plasma,
capillary discharges etc), plasma devices with metal
powder and tin vapour [1-3]. All these devices have some
advantages and disadvantages, but there is general
important diagnostic task for development and
improvement these facilities as light sources –registration
and measurement of EUV radiation in different wave-
length ranges with high temporal and spatial resolution.
2. SCHEME OF EUV REGISTRATION
SYSTEM
One of the most universal methods of EUV radiation
registration is based on application of semiconductor
photodiodes. The photodiodes for registration of EUV
spectral range must be installed in vacuum chamber,
because EUV radiation is strongly attenuated in
atmosphere. The semiconductor detectors can be used
with different kind of filters for selection of necessary
wavelength range. Applying filters result in reduce of the
radiation intensity and measured signal amplitude.
Thereby, the photodiodes must have sufficient sensitivity
in this range. Another important detector parameter is
amplitude-frequency characteristic, since a majority of
EUV sources have pulsed regime of operation. Typical
pulse duration lies from several nanoseconds to some
microseconds. In this work, absolutely calibrated AXUV
diodes manufactured by IRD inc. were used to measure
the radiation intensity and radiation energy in required
wavelength ranges [4]. From these measurements
efficiency of radiation source can be evaluated.
The AXUVE based diagnostic system for selection
and registration of EUV radiation from plasma stream
was designed, manufactured and tested in plasma
experiments. The block scheme of registration equipment
is shown in Fig. 1. This system consists from duralumin
corps with 20 cm in diameter, height of 6 cm and
connection tube from stainless steel with maximum
diameter of 26 mm and 10 cm in length. Connection tube
consists from two coaxial tubes. Outer tube is used for
connection of diagnostic system with vacuum chamber of
plasma source [5, 6] and for vacuum pumping of corps.
Permanent magnets
AXUV
Multi-layer mirror
Rail for AXUV
Connection tube
with diaphragms
Line of
view
Duralumin corps
Fig. 1. Block diagram of the registration system
The inner tube with diameter of 12 mm has two
diaphragms (input and output). The diaphragms determine
line of view and spatial resolution for measurements of
EUV radiation. Typical spatial resolution in near axis
region is below 1 cm. Two permanent magnets were
installed between walls of inner and outer tubes in order
to provide deflecting magnetic field with strength up to
0.5 T inside inner tube. This field prevents charged
particles penetration into the registration tract.
In central part of diagnostic system the multi-layer
mirror has been installed. The mirror has a possibility for
rotation around the centre of corps providing variation of
reflection angle from the mirror surface. The multilayer
mirror [7, 8] in registration system was adjusted for
radiation in 13.5 nm wavelength, but radiation in visible
wave range could be reflected from mirror too. Possible
influence of visible radiation on results of AXUV
measurements has been checked. The detector in special
holding system was mounted on rail in registration system
PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY. 2011. № 1. 185
Series: Plasma Physics (17), p. 185-187.
and had possibility of moving around the centre of corps
and measuring visible and EUV radiation. Different types
of AXUV diodes were applied for EUV radiation
measurements.
Output part of the inner tube has holding ring for
installation of different kinds of filters [9]. It made
possible changing the range of wavelengths, which
measured by AXUV (without additional internal filter).
Aluminium foil with different thickness and quartz was
also used as filters in our experiments. Multi-layer Mo/Si
mirror was applied in first stage of experiments as
selective element.
3. INFLUENCE OF CHARGED PARTICLES
The flow of particles from plasma stream through the
connection tube to AXUV surface is one of possible
obstacles for accurate measurements of EUV. Copper
collector (with size corresponding to AXUV dimension)
was applied for measurements of particles current. The
collector was installed into AXUV holder with line of
view directly to the plasma stream through varied number
of diaphragms. The flow of electrons and ions along the
connection tube to the collector surface was registered.
The current of ions measured by collector was up to
(0.1…0.3) A if no diaphragms applied. A typical signal of
particles current to the collector is presented in Fig 2.
Fig. 2. Wave forms of discharge current at Uc=20 kV (1),
particles current to the collector (2) and radiation in
visible wave range, measured by photodiode(3)
As it is shown in this figure, the currents of electrons and
ions were clearly observed. The current of electrons
appears first and it starts earlier than signal from
photodiode. Duration the electron current signal is about
6...8 μs. The current of ions starts after 10...12 μs from
the discharge ignition and in the same time moment with
photodiode signal. The duration of ion current is about
30-35 μs and it corresponds to duration of radiation in
visible wave range. The maximum value of ion current in
this figure is about 0.1 A. The values of electron and ion
currents were decreased by several times using input and
output diaphragms with diameter of 1 and 1.2 mm
correspondingly, but it still has essential level up to
(1...3)×10-3A. Time evolution of electron and ion currents
remains without changes. Two permanent magnets were
installed between walls of outer and inner connection
tubes for more effective suppression of electron and ion
currents. The magnets provided magnetic field across
particles flow direction with strength up to 0.5 T. In this
perpendicular magnetic field most of particles were
deflected to the wall. Thus electron and ion currents to the
collector decrease drastically. The detected current falls
down (1...2)×10-6 A. Thereby, the negative influence of
particle current on EUV measurements was reduced
below the level of sensitivity in diagnostic equipment.
4. TESTS OF REGISTRATION SYSTEM
AND FIRST RESULTS
First experimental tests of registration system were
made to check the influence of high power visible
radiation from the compression zone to our EUV detector.
The AXUV-20 photodiode with Mo/Si film on the surface
was used for EUV measurements in narrow bandwidth of
12.2…15.8 nm. Detector was installed to the holder of
registration system. A quartz glass was applied as the
filter for visible light selection. It was installed in front of
AXUV-20 Mo/Si. Radiation measurements from the
plasma stream showed that radiation with wave length
more than 200 nm and, in particular, in visible wave
range did not registered by the detector. The level of
signal was less than 1 mV (noise-level). Thus, the
radiation in visible wave range doesn’t make influence on
measurements in EUV region.
Typical signals from AXUV (in EUV region), the
radiation intensity of visible xenon lines (observed by
photoelectronic multiplier with spectral selector) and the
discharge current are shown in Fig. 3. From this data
follows that with reduction of wavelength the start time of
light emission shifts to the moment of discharge ignition.
0 10 20 30 40
-1
0
1
2
50
D
is
ch
ar
ge
cu
rr
en
t,
a.
u
Discharge time, μs
Xe II (529,2 nm)
Xe IV (375,0 nm)
Axuv
(12.2-15.8 nm) R
ad
ia
tio
n
in
te
ns
ity
, a
.u
.
Fig. 3. Waveforms of discharge current and radiation
intensity in visible and EUV region
10 µs
Thus, the experiments show that the electromagnetic
radiation from plasma discharge, and also the particles
flux from the plasma stream to AXUV through
connection tube, doesn't make any influence on
performed EUV measurements.
It was found that radiation peak from the
compression zone, measured in half width, is about
3…5 μs. The intensity of EUV radiation rises with
increase of discharge current and this increasing is faster
than registered grow of visible radiation intensity.
EUV radiation depends on operation modes of
magnetoplasma compressor. It was discovered that most
186
187
important parameter in this case is time delay between the
gas injection start and the moment of discharge ignition.
In present experiments the time delay was varied between
400 to 600 μs. The maximum intensity of EUV radiation
was measured when time delay is 450 μs. The intensity of
EUV radiation is reduced with increasing of the time
delay up to 600 μs.
5. SUMMARY
Diagnostic system for EUV measurements based on
AXUV detectors was designed, manufactured and tested.
Permanent magnets were applied to decrease the
influence of particles flux from plasma stream to AXUV
surface. It was achieved, that the influence of particles on
AXUV detector became less than sensitivity of
equipment. Therefore, it doesn’t have any influence on
the EUV measurements. It was shown, that
electromagnetic radiation from the plasma discharge, does
not affect results of measurements.
The EUV radiation in 5…13 nm wave range was
monitored. The region of measured wavelengths was
selected by film filter and type of AXUV detector.
The intensity of EUV radiation rises with increase of
discharge current and this increasing is faster than grow
of visible radiation intensity. It was found that radiation
peak from the compression zone, measured in half width,
is about 3…5 μs.
It is shown that the maximum level of EUV radiation
depends on operation modes of magnetoplasma
compressor. The most important parameter, which
determines the variation of operation mode, is time delay
between the gas injection start and the moment of
discharge ignition.
REFERENCES
1. V.I. Krauz. Progress in plasma focus research and
applications // Plasma Phys. Controlled Fusion. 2006,
v. 48, p. B221-229.
2. I.V. Fomenkov, N. Bowering, C.L. Rettig, et al. EUV
discharge light source based on a dense plasma focus
operated with positive and negative polarity // Journal
of Physics D: Appl.Phys. 2004, v. 37, p. 3266-3276.
3. E.R. Kieft, J. J. A. M. van der Muller, et al. Characteriz
ation of a vacuum-arc discharge in tin vapor using time-
resolved plasma imaging and extreme ultraviolet
spectrometry // Phys. Rev. E. 2005, v. 71, p. 026409.
4. R.E. Vest, S. Grantham. Response of a silicon
photodiode to pulsed radiation // Applied Optics, 2003,
v. 42, N 25, p. 5054-5063.
5. V.V. Chebotarev, et al. Investigation of pinching
discharges in MPC device operating with nitrogen and
xenon gases // Czechoslovak Journal of Physics. 2006,
v. 56, Suppl. 2, p. B335-B341.
6. V.V. Chebotarev, et al. Dynamics of nitrogen and
xenon plasma streams generated by MPC device//
Problems of Atomic Science and Technology. Series
“Plasma Physics” (13). 2007, N 1, p. 104-106.
7. E.P. Kruglyakov, et al. Multilayer mirrors for X-ray
radiation // Plasma Physics. 1992, v. 4, N 18,
p. 482-484.
8. Darren A. Alman, Huatan Qiu, T. Spila, et al.
Characterization of collector optic material samples
exposed to a discharge-produced plasma extreme
ultraviolet light source // J. Micro/Nanolith. MEMS
MOEMS. 2007, v. 6, p. 013006.
9. V.P. Belik, Yu.M. Zadirov, et al. Development free
optical filter in 12-15 nm wave range for
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v. 33(12), p. 29 (in Russian).
Article received 12.11.10.
СИСТЕМА РЕГИСТРАЦИИ ВУФ- ИЗЛУЧЕНИЯ ИЗ КСЕНОНОВОЙ ПЛАЗМЫ ВЫСОКОЙ
ПЛОТНОСТИ, ГЕНЕРИРУЕМОЙ МПК
Ю.В. Петров, И.Е. Гаркуша, A. Hassanein, Д.Г. Соляков, А.К. Марченко, В.В. Чеботарев, М.С. Ладыгина,
В.В. Стальцов, Д.В. Елисеев
Магнитоплазменный компрессор (МПК) компактной геометрии был разработан и испытан в качестве
источника излучения ВУФ. В настоящей работе описана диагностическая система для регистрации излучения
ВУФ. Проведены измерения ВУФ-излучения в различных режимах работы МПК. Система регистрации
построена на основе сочетания различных типов фотодиодов AXUV. Было исследовано влияние потока
электронов и ионов из плазмы на поверхность детектора, а также видимого излучения на результаты
измерений.
СИСТЕМА РЕЄСТРАЦІЇ ВУФ ВИПРОМІНЮВАННЯ З КСЕНОНОВОЇ ПЛАЗМИ ВИСОКОЇ
ГУСТИНИ, ЯКА ГЕНЕРИРУЄТЬСЯ МПК
Ю.В. Петров, І.Є. Гаркуша, A. Hassanein, Д.Г.Соляков, Г.К. Марченко, В.В. Чеботарьов, М.С. Ладигіна,
В.В. Стальцов, Д.В. Єлісеєв
Магнітоплазмовий компресор (МПК) компактної геометрії було розроблено і випробувано у якості джерела
випромінювання ВУФ. У цій роботі описана діагностична система для реєстрації ВУФ-випромінювання.
Проведено вимірювання ВУФ- випромінювання в різних режимах роботи МПК. Система реєстрації побудована
на основі поєднання різних типів фотодіодів AXUV. Було досліджено вплив потоку електронів та іонів з плазми
на поверхню детектора, а також видимого випромінювання на результати вимірювань.
http://spiedl.aip.org/vsearch/servlet/VerityServlet?KEY=SPIEDL&possible1=Alman%2C+Darren+A.&possible1zone=author&maxdisp=25&smode=strresults&aqs=true
http://spiedl.aip.org/vsearch/servlet/VerityServlet?KEY=SPIEDL&possible1=Qiu%2C+Huatan&possible1zone=author&maxdisp=25&smode=strresults&aqs=true
http://spiedl.aip.org/vsearch/servlet/VerityServlet?KEY=SPIEDL&possible1=Spila%2C+T.&possible1zone=author&maxdisp=25&smode=strresults&aqs=true
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| id | nasplib_isofts_kiev_ua-123456789-91072 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1562-6016 |
| language | English |
| last_indexed | 2025-12-01T04:32:35Z |
| publishDate | 2011 |
| publisher | Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
| record_format | dspace |
| spelling | Petrov, Yu.V. Garkusha, I.E. Hassanein, A. Solyakov, D.G. Marchenko, A.K. Chebotarev, V.V. Ladygina, M.S. Staltsov, V.V Yelisyeyev, D.V. 2016-01-06T17:17:53Z 2016-01-06T17:17:53Z 2011 Diagnostic system for EUV radiation measurements from dense xenon plasma generated by MPC / Yu.V. Petrov, I.E. Garkusha, A. Hassanein, D.G. Solyakov, A.K. Marchenko1, V.V. Chebotarev, M.S. Ladygina, V.V. Staltsov, D.V. Yelisyeyev // Вопросы атомной науки и техники. — 2011. — № 1. — С. 185-187. — Бібліогр.: 9 назв. — англ. 1562-6016 PACS: 52.59.Dk, 52.70.Kz https://nasplib.isofts.kiev.ua/handle/123456789/91072 Magnetoplasma compressor (MPC) of compact geometry has been designed and tested as a source of EUV radiation. In present paper diagnostic system for registration of EUV radiation is described. It was applied for radiation measurements in different operation modes of MPC. The registration system was designed on the base of combination of different types of AXUV photodiodes. Possibility to minimize the influence of electrons and ions flows from dense plasma stream on AXUV detector performance and results of the measurements has been discussed. Магнітоплазмовий компресор (МПК) компактної геометрії було розроблено і випробувано у якості джерела випромінювання ВУФ. У цій роботі описана діагностична система для реєстрації ВУФ-випромінювання. Проведено вимірювання ВУФ- випромінювання в різних режимах роботи МПК. Система реєстрації побудована на основі поєднання різних типів фотодіодів AXUV. Було досліджено вплив потоку електронів та іонів з плазми на поверхню детектора, а також видимого випромінювання на результати вимірювань. Магнитоплазменный компрессор (МПК) компактной геометрии был разработан и испытан в качестве источника излучения ВУФ. В настоящей работе описана диагностическая система для регистрации излучения ВУФ. Проведены измерения ВУФ-излучения в различных режимах работы МПК. Система регистрации построена на основе сочетания различных типов фотодиодов AXUV. Было исследовано влияние потока электронов и ионов из плазмы на поверхность детектора, а также видимого излучения на результаты измерений. en Національний науковий центр «Харківський фізико-технічний інститут» НАН України Вопросы атомной науки и техники Диагностика плазмы Diagnostic system for EUV radiation measurements from dense xenon plasma generated by MPC Система реєстрації ВУФ випромінювання з ксенонової плазми високої густини, яка генерирується МПК Система регистрации ВУФ - излучения из ксеноновой плазмы высокой плотности, генерируемой МПК Article published earlier |
| spellingShingle | Diagnostic system for EUV radiation measurements from dense xenon plasma generated by MPC Petrov, Yu.V. Garkusha, I.E. Hassanein, A. Solyakov, D.G. Marchenko, A.K. Chebotarev, V.V. Ladygina, M.S. Staltsov, V.V Yelisyeyev, D.V. Диагностика плазмы |
| title | Diagnostic system for EUV radiation measurements from dense xenon plasma generated by MPC |
| title_alt | Система реєстрації ВУФ випромінювання з ксенонової плазми високої густини, яка генерирується МПК Система регистрации ВУФ - излучения из ксеноновой плазмы высокой плотности, генерируемой МПК |
| title_full | Diagnostic system for EUV radiation measurements from dense xenon plasma generated by MPC |
| title_fullStr | Diagnostic system for EUV radiation measurements from dense xenon plasma generated by MPC |
| title_full_unstemmed | Diagnostic system for EUV radiation measurements from dense xenon plasma generated by MPC |
| title_short | Diagnostic system for EUV radiation measurements from dense xenon plasma generated by MPC |
| title_sort | diagnostic system for euv radiation measurements from dense xenon plasma generated by mpc |
| topic | Диагностика плазмы |
| topic_facet | Диагностика плазмы |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/91072 |
| work_keys_str_mv | AT petrovyuv diagnosticsystemforeuvradiationmeasurementsfromdensexenonplasmageneratedbympc AT garkushaie diagnosticsystemforeuvradiationmeasurementsfromdensexenonplasmageneratedbympc AT hassaneina diagnosticsystemforeuvradiationmeasurementsfromdensexenonplasmageneratedbympc AT solyakovdg diagnosticsystemforeuvradiationmeasurementsfromdensexenonplasmageneratedbympc AT marchenkoak diagnosticsystemforeuvradiationmeasurementsfromdensexenonplasmageneratedbympc AT chebotarevvv diagnosticsystemforeuvradiationmeasurementsfromdensexenonplasmageneratedbympc AT ladyginams diagnosticsystemforeuvradiationmeasurementsfromdensexenonplasmageneratedbympc AT staltsovvv diagnosticsystemforeuvradiationmeasurementsfromdensexenonplasmageneratedbympc AT yelisyeyevdv diagnosticsystemforeuvradiationmeasurementsfromdensexenonplasmageneratedbympc AT petrovyuv sistemareêstracíívufvipromínûvannâzksenonovoíplazmivisokoígustiniâkageneriruêtʹsâmpk AT garkushaie sistemareêstracíívufvipromínûvannâzksenonovoíplazmivisokoígustiniâkageneriruêtʹsâmpk AT hassaneina sistemareêstracíívufvipromínûvannâzksenonovoíplazmivisokoígustiniâkageneriruêtʹsâmpk AT solyakovdg sistemareêstracíívufvipromínûvannâzksenonovoíplazmivisokoígustiniâkageneriruêtʹsâmpk AT marchenkoak sistemareêstracíívufvipromínûvannâzksenonovoíplazmivisokoígustiniâkageneriruêtʹsâmpk AT chebotarevvv sistemareêstracíívufvipromínûvannâzksenonovoíplazmivisokoígustiniâkageneriruêtʹsâmpk AT ladyginams sistemareêstracíívufvipromínûvannâzksenonovoíplazmivisokoígustiniâkageneriruêtʹsâmpk AT staltsovvv sistemareêstracíívufvipromínûvannâzksenonovoíplazmivisokoígustiniâkageneriruêtʹsâmpk AT yelisyeyevdv sistemareêstracíívufvipromínûvannâzksenonovoíplazmivisokoígustiniâkageneriruêtʹsâmpk AT petrovyuv sistemaregistraciivufizlučeniâizksenonovoiplazmyvysokoiplotnostigeneriruemoimpk AT garkushaie sistemaregistraciivufizlučeniâizksenonovoiplazmyvysokoiplotnostigeneriruemoimpk AT hassaneina sistemaregistraciivufizlučeniâizksenonovoiplazmyvysokoiplotnostigeneriruemoimpk AT solyakovdg sistemaregistraciivufizlučeniâizksenonovoiplazmyvysokoiplotnostigeneriruemoimpk AT marchenkoak sistemaregistraciivufizlučeniâizksenonovoiplazmyvysokoiplotnostigeneriruemoimpk AT chebotarevvv sistemaregistraciivufizlučeniâizksenonovoiplazmyvysokoiplotnostigeneriruemoimpk AT ladyginams sistemaregistraciivufizlučeniâizksenonovoiplazmyvysokoiplotnostigeneriruemoimpk AT staltsovvv sistemaregistraciivufizlučeniâizksenonovoiplazmyvysokoiplotnostigeneriruemoimpk AT yelisyeyevdv sistemaregistraciivufizlučeniâizksenonovoiplazmyvysokoiplotnostigeneriruemoimpk |