Levitation of particles in O₂ plasma
Oxygen discharges are scientifically and industrially interesting owing to chemical properties and physical effects. These latter are mostly due to the presence of negative ions affecting the plasma boundary in front of the surface to be processed. In this contribution we use particles levitating...
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| Published in: | Физическая инженерия поверхности |
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| Date: | 2004 |
| Main Authors: | , , , , |
| Format: | Article |
| Language: | English |
| Published: |
Науковий фізико-технологічний центр МОН та НАН України
2004
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| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/98489 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Levitation of particles in O₂ plasma / B.M. Annaratone, T. Antonova, V.A. Lisovskiy, H.M. Thomas, G.E. Morfill // Физическая инженерия поверхности. — 2004. — Т. 2, № 4. — С. 165–167. — Бібліогр.: 4 назв. — англ. |