One-beam dynamic ion mixing applied to coat elements onto sophistically shaped objects

• Published in: Физическая инженерия поверхности
• Date: 2007
• Main Authors: Boyko, E.B., Komarov, F.F., Jukowski, P., Karwat, C., Kolasik, M., Kozak, C.
• Format: Article
• Language: English
• Published: Науковий фізико-технологічний центр МОН та НАН України 2007
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/98834
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: One-beam dynamic ion mixing applied to coat elements onto sophistically shaped objects / E.B. Boyko, F.F. Komarov, P. Jukowski, C. Karwat, M. Kolasik, C. Kozak // Физическая инженерия поверхности. — 2007. — Т. 5, № 3-4. — С. 217–221. — Бібліогр.: 9 назв. — англ.

Recently suggested single-ion-beam setup for ion-beam assisted deposition (IBAD) of layers with
 various composition including the sputter target in a form of hollow truncated cone made of the
 material to be deposited allows the use of a single ion beam (e.g., noble gas) for simulta...