One-beam dynamic ion mixing applied to coat elements onto sophistically shaped objects
Recently suggested single-ion-beam setup for ion-beam assisted deposition (IBAD) of layers with various composition including the sputter target in a form of hollow truncated cone made of the material to be deposited allows the use of a single ion beam (e.g., noble gas) for simultaneous layer dep...
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| Veröffentlicht in: | Физическая инженерия поверхности |
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| Datum: | 2007 |
| Hauptverfasser: | , , , , , |
| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
Науковий фізико-технологічний центр МОН та НАН України
2007
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| Online Zugang: | https://nasplib.isofts.kiev.ua/handle/123456789/98834 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Zitieren: | One-beam dynamic ion mixing applied to coat elements onto sophistically shaped objects / E.B. Boyko, F.F. Komarov, P. Jukowski, C. Karwat, M. Kolasik, C. Kozak // Физическая инженерия поверхности. — 2007. — Т. 5, № 3-4. — С. 217–221. — Бібліогр.: 9 назв. — англ. |