Comparative study of positive and negative ion flows extracted from downstream plasmas beyond magnetic and electrostatic electron filters

• Veröffentlicht in: Физическая инженерия поверхности
• Datum: 2012
• Hauptverfasser: Dudin, S., Rafalskyi, D., Popelier, L., Aanesland, A.
• Format: Artikel
• Sprache: Englisch
• Veröffentlicht: Науковий фізико-технологічний центр МОН та НАН України 2012
• Online Zugang: https://nasplib.isofts.kiev.ua/handle/123456789/98924
• Назва журналу: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Zitieren: Comparative study of positive and negative ion flows extracted from downstream plasmas beyond magnetic and electrostatic electron filters / S. Dudin, D. Rafalskyi, L. Popelier, A. Aanesland // Физическая инженерия поверхности. — 2012. — Т. 10, № 1. — С. 22–28. — Бібліогр.: 26 назв. — англ.

In the present paper we compare the positive and negative ion flows created using a recently developed electrostatic grid-type filter with the flows formed using a magnetic filter. Langmuir probe measurements show electron cooling with both filters, allowing effective formation of negative ions vi...