Аналіз стану розвитку теплових сенсорів потоку загального, біомедичного та екологічного призначення

The paper analyzed the characteristics of microelectronic flow sensors, which made it possible to draw a number of important conclusions, namely: modern microelectronic thermal flow sensors, and in particular biomedical sensors, are characterized by a significant variety of principles of signal form...

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Bibliographic Details
Date:2022
Main Authors: Павлов, С.В., Вуйцік, Вальдемар, Голяка, Р.Л., Азаров, О.Д., Богомолов, С.В., Лунінь, Ян
Format: Article
Language:English
Published: Vinnytsia National Technical University 2022
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Online Access:https://oeipt.vntu.edu.ua/index.php/oeipt/article/view/617
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Journal Title:Optoelectronic Information-Power Technologies

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Optoelectronic Information-Power Technologies
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Summary:The paper analyzed the characteristics of microelectronic flow sensors, which made it possible to draw a number of important conclusions, namely: modern microelectronic thermal flow sensors, and in particular biomedical sensors, are characterized by a significant variety of principles of signal formation - from elementary linear converters based on one sensitive element to non-linear ones ( generation, time-dependent) converters based on matrices of functionally integrated elements. The problem of energy consumption of thermal flow sensors remains relevant. This is especially characteristic when powering destination sensors from autonomous, i.e., small-sized, low-power, low-voltage electrochemical cells. A decrease in energy consumption (power and heating temperature) leads to the parasitic effect of signal line resistances and, as a result, to the deterioration of functional characteristics, in particular, to a decrease in the accuracy of flow rate measurement.