Отримання мікропоруватих шарів GaAs методом хімічного травлення на підкладках р-GaAs та їхня фотолюмінісценція

• Date: 2012
• Main Authors: Paschenko, G. A., Kravetsky, M. Yu., Fomin, A. V.
• Format: Article
• Language: Russian
• Published: Chuiko Institute of Surface Chemistry National Academy of Sciences of Ukraine 2012
• Online Access: https://www.cpts.com.ua/index.php/cpts/article/view/150
• Journal Title: Chemistry, Physics and Technology of Surface

The porous GaAs layers have been obtained on the GaAs(100) and GaAs(111) substrates by the chemical etching method. Etching of the substrates was carried out in HF-based solutions using HNO3 or Н2О2 as an oxidizer. Sponge layers were formed with adding of HNO3 and pores got pyramid-like shapes unifo...