Дослідження теплофізичних властивостей кристалічного кремнію
The thermophysical properties of Si (c) have been studied theoretically. Using the Comsol Multiphysics software package, mathematical modeling of temperature distribution in the Si (c) plate is carried out. It has been shown that femtosecond laser pulses can efficiently warm samples of crystalline s...
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| Datum: | 2012 |
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| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | Ukrainisch |
| Veröffentlicht: |
Chuiko Institute of Surface Chemistry National Academy of Sciences of Ukraine
2012
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| Online Zugang: | https://www.cpts.com.ua/index.php/cpts/article/view/183 |
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| Назва журналу: | Chemistry, Physics and Technology of Surface |
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Chemistry, Physics and Technology of Surface| Zusammenfassung: | The thermophysical properties of Si (c) have been studied theoretically. Using the Comsol Multiphysics software package, mathematical modeling of temperature distribution in the Si (c) plate is carried out. It has been shown that femtosecond laser pulses can efficiently warm samples of crystalline silicon. The near-surface region with thickness of 5 microns is heated most efficiently. |
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