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Дослідження морфології наночастинок SiO2 у полірувальних суспензіях методами АСМ і СЕМ

A method is described of obtaining and investigation of the morphology of nanoparticles in concentrated aqueous slurries based on pyrogenic silica and silica sol obtained by the ion exchange technology. These results are useful for development of polishing compositions and also to establish the form...

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Bibliographic Details
Date:2014
Main Authors: Kosenok, Ya. A., Gaishun, V. E., Tyulenkova, O. I., Denisman, V. G., Gerasimenya, T. A., Matyushonok, O. A.
Format: Article
Language:Ukrainian
Published: Chuiko Institute of Surface Chemistry National Academy of Sciences of Ukraine 2014
Subjects:
полірування суспензії
наночастинки кремнезему
АСМ та СЕМ дослідження
силікатний золь
Online Access:https://www.cpts.com.ua/index.php/cpts/article/view/266
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Journal Title:Chemistry, Physics and Technology of Surface

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Chemistry, Physics and Technology of Surface
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Summary:A method is described of obtaining and investigation of the morphology of nanoparticles in concentrated aqueous slurries based on pyrogenic silica and silica sol obtained by the ion exchange technology. These results are useful for development of polishing compositions and also to establish the formation regularities of structural, chemical and electrical properties of the surface as well as for the explanation of the mechanism of chemical-mechanical polishing of semiconductor materials.

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