Gaishun, V. E., Kosenok, Y. A., Tyulenkova, O. I., Turov, V. V., & Gun'ko, V. M. (2008). Usage of suspensions based on fumed silica for mechano-chemical polishing of single-crystalline silicon. Chuiko Institute of Surface Chemistry National Academy of Sciences of Ukraine.
Chicago-Zitierstil (17. Ausg.)Gaishun, V. E., Y. A. Kosenok, O. I. Tyulenkova, V. V. Turov, und V. M. Gun'ko. Usage of Suspensions Based on Fumed Silica for Mechano-chemical Polishing of Single-crystalline Silicon. Chuiko Institute of Surface Chemistry National Academy of Sciences of Ukraine, 2008.
MLA-Zitierstil (8. Ausg.)Gaishun, V. E., et al. Usage of Suspensions Based on Fumed Silica for Mechano-chemical Polishing of Single-crystalline Silicon. Chuiko Institute of Surface Chemistry National Academy of Sciences of Ukraine, 2008.