Одержання та дослідження гетероструктури ZnO:Al/por-Si/Si

Sol-gel method followed by centrifugation obtained film ZnO: Al porous substrates on Si (1 1 1). The influence of annealing temperature and the amount of application and drying of sol layers on the surface roughness, structural stability of ZnO:Al film, shrinkage and compaction of the film, physical...

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Bibliographic Details
Date:2020
Main Authors: Dyadenchuk, A. F., Kidalov, V. V.
Format: Article
Language:Ukrainian
Published: Chuiko Institute of Surface Chemistry National Academy of Sciences of Ukraine 2020
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Online Access:https://www.cpts.com.ua/index.php/cpts/article/view/558
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Journal Title:Chemistry, Physics and Technology of Surface

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Chemistry, Physics and Technology of Surface