CORRELATION OF THE SURFACE STRUCTURE OF THE RuO2/Ti AND TiO2 /Ti FILMS WITH ELECTROCHEMICAL IMPEDANCE DATA

The surface structure and nature of the capacitance formation of RuO2/Ti and TiO2 /Ti films are discussed. The factors affecting the reversibility of the adsorption-desorption processes of oxygen on the surface of RuO2/Ti and TiO2 /Ti films are described. The influence of the geometry of the pore, r...

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Дата:2022
Автори: Linyucheva, Olga, Pershina, Katherine
Формат: Стаття
Мова:Англійська
Опубліковано: V.I.Vernadsky Institute of General and Inorganic Chemistry 2022
Онлайн доступ:https://ucj.org.ua/index.php/journal/article/view/475
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Назва журналу:Ukrainian Chemistry Journal
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Ukrainian Chemistry Journal
_version_ 1871465863809335296
author Linyucheva, Olga
Pershina, Katherine
author_facet Linyucheva, Olga
Pershina, Katherine
author_institution_txt_mv [ { "author": "Olga Linyucheva", "institution": "Хіміко-технологічного факультету КПІ ім.Ігоря Сікорського" }, { "author": "Katherine Pershina", "institution": "Vernadsky Institute of General and Inorganic Chemistry N.A.S of Ukraine, Kiev, Palladin av., 32\/34,03142 Ukraine" } ]
author_sort Linyucheva, Olga
baseUrl_str https://ucj.org.ua/index.php/journal/oai
collection OJS
datestamp_date 2026-07-22T08:23:50Z
description The surface structure and nature of the capacitance formation of RuO2/Ti and TiO2 /Ti films are discussed. The factors affecting the reversibility of the adsorption-desorption processes of oxygen on the surface of RuO2/Ti and TiO2 /Ti films are described. The influence of the geometry of the pore, ruthenium content, thickness of the films, and the capacitance value of oxide films was studied using electron microscopy and electrochemical impedance spectroscopy. The changes in pore content and their geometry depending on Ru concentration are fixed by electron microscopy. The changing capacitance and capacitance dispersion in a wide frequency range was used to obtain 3D images of the film's surface. A scheme of the adsorption-absorption ratio changing in relation to the pore’s structure of the films was proposed. The study of the composition, morphological structure and electrochemical behaviour of RuO2/Ti and TiO2 /Ti films determined the impact of the pore shape of surface films on the adsorption-absorption ratio of oxygen, which regulated technical data of sensors. By changing the capacitance and capacitance dispersion in a wide frequency range, it was proposed to obtain 3D images of the surface. It was found that decrease of DEL capacitance has following relationships: large V-shaped pores on the boundary of titanium base and oxide film and on the surface of film > small V-shaped pores on the boundary of titanium base and oxide film, and large pores on the surface of film > rectangular-shaped pores on the boundary of titanium base and oxide film and small V-shaped pores on the surface of film. The formation of the pore geometry and surface structure is dependent on the ration of ruthenium and the thickness of films. So, it is possible to change the morphological and electrochemical properties of sensors by the regulation of ruthenium content.
doi_str_mv 10.33609/2708-129X.88.08.2022.97-105
first_indexed 2025-09-24T17:43:46Z
format Article
fulltext 97 UDK 544.6.018+544.6.076 doi: 10.33609/2708-129X.88.08.2022.97-105 CORRELATION OF THE SURFACE STRUCTURE OF THE RuO2/Ti AND TiO2 /Ti FILMS WITH ELECTROCHEMICAL IMPEDANCE DATA O. Linucheva1, K. Pershina2 1National Technical University of Ukraine “Igor Sikorsky Kyiv Polytechnic Institute”, 37 Peremogy avе., build. 4, Kyiv 03056, Ukraine 2Vernadskiy Institute of General and Inorganic Chemistry N.A.S of Ukraine, 32/34 Acad. Palladin ave., Kyiv 03142, Ukraine Е-mail: katherinepersh@gmail.com The surface structure and nature of the capacitance formation of RuO2/Ti and TiO2/Ti films are discussed. The factors affecting the reversibility of the adsorption-desorption pro- cesses of oxygen on the surface of RuO2/Ti and TiO2 /Ti films are described. The influence of the geometry of the pore, ruthenium content, thickness of the films, and the capacitance value of oxide films was studied using electron microscopy and electrochemical impedance spect roscopy. The changes in pore content and their geometry depending on Ru concentration are fixed by electron microscopy. The changing capacitance and capacitance dispersion in a wide frequency range was used to obtain 3D images of the film's surface. A scheme of the adsorp- tion-absorption ratio changing in relation to the pore’s structure of the films was proposed. Keywords: ruthenium, titanium, surface film, pore geometry, capacitance, sensitivity. INTRODUCTION. The increasing concern in the detection of combustion gases calls for the development of highly sensitive sensor de- vices as well as for the understanding and de- termination of simplified models of such sen- sor operation mechanisms. For many years the main interest has been focused on wide band- gap semiconducting metal oxides such as SnO2, ZnO, and TiO2, which suffer changes in con- ductance when oxidizing or reducing species in the air, which have the ability to chemisorb- ing onto the oxide particle or film surface [1, 2]. However, sensors based on TiO2 systems re- quire more effort in order to improve the se- lectivity, stability, and response times at high temperatures (300 °C–600 °C) [3, ]. One of the suggested methods for improving the perfor- mance of such sensors is doping TiO2-based systems with variable valence elements such as Pt, Ru, Cr, etc. [5–7] or semi-conductive oxi des [8−10]. The simplicity and high sensitivity of these devices are based on the high surface area, high porosity, and effective surface modu lation of the oxides [11]. In the presence of the stoichiometric RuO2 (110) surface is terminat- ed by bridge-coordinated oxygen atoms (Oβ) and by coordinatively unsaturated Ru (Rucus) atoms. The exposure to gaseous O2 leads to the 98 ISSN 2708-129X. Укр. хім. журн., 2022 CORRELATION OF THE SURFACE STRUCTURE OF THE RuO2/Ti AND TiO2 /Ti FILMS WITH ELECTROCHEMICAL IMPEDANCE DATAPHISICAL CHEMISTRY formation of two additional surface species: a molecularly chemisorbed state (Oσ) bridging two neighboring Rucus atoms and weakly held O atoms (Oγ) in a terminal position above the Rucus atoms [12−14]. Based on such properties a new thick film oxygen potentiometric sensors have been developed. Moreover, TiO2-coated RuO2 electrodes showed a linear response as a function of the logarithm of the dissolved oxygen concentration in the 0.5–8 ppm range (log [O2], −4.82 to −3.60; concentration of O2 in mol dm−3). The electrode displays a Nern- stian slope of 59.4 mV per decade at 25 °C. The value of this slope suggests the presence of a reaction involving one electron per oxygen molecule which was tentatively attributed to the formation of super-oxide ions at the elec- trode surface [15]. So, it has many questions about the formation of sensitive properties of TiO2/ RuO2 films. But there is no systematic study of the correlation between surface pore configuration and electrochemical behavior of the films. The present study focuses on under- standing the role of the thickness and compo- nent composition of TiO2/ RuO2 films in the electrochemical behavior of sensors. EXPERIMENT AND DISCUSSIONS OF THE RESULTS. Synthesis of Undoped and Doped TiO2 films was realized by three various methods: pyrolysis, spray - pyrolysis and sol- gel precipitation. Pyrolysis. Catalytically active titanium based coatings were obtained by thermal de- composition of the corresponding metal salts. To do this, a calculated amount of metal salt was dissolved in water, added to the titanium powder and dried under a lamp reflector in a porcelain bowl, after which the composition was subject to calcination in a muffle furnace in a titanium crucible at a certain temperature. In order to avoid catalyst losses, decomposi- tion was carried out in a muffle furnace in the presence of porous ceramic soaked in water. All powders were stored in closed containers. The reaction of the pyrolysis in the presence of water ends with the formation of oxide: RuOHCl3 + H2O = RuO2 +3HCl ↑ TiCl4 + 2 H2O → TiO2 +4HCl ↑. Spray- pyrolysis: the production of TiO2 films is based on the thermal decomposition of aerosol salt solutions on hot substrates. Aerosol phase was obtained by pneumatic method. The experimental setup consisted of elements such as a compressor, an atomizer, a substrate hold- er, a reaction chamber, an oven, a measuring tank for spray. The furnace used for pyrolysis was of a cylindrical type: 0.1 m in diameter and 0.2 meter in length. The sprayer had an outlet with a diameter of ~ 2.5x10-4 m. The gas was purified air under a pressure of 1.3−2.5 atm. A water-alcohol solution of titanium chloride was used as a precursor. The initial concentra- tion of the solution was 0.2 M. This concentra- tion is optimal for the deposition time of the film, which affects the cooling of the substrate during the deposition process and the ability to control the thickness and growth rate of the TiO2 film. The solution was sprayed onto heat- ed titanium substrates. The substrate tempera- ture was in the range of T = 400−450 ° C (the optimum temperature range for the manufac- ture of gas sensors). Films deposited at the in- dicated temperatures have maximum porosity. The flow rate of the solution during deposition was ~ 0.1 ml / s. Sol-Gel: The method included several main technological phases. Initially, water or orga nic solutions of the initial substances were ob- tained. To obtain a sol we used hydrolysis of 99https://ucj.org.ua O. Linucheva, K. Pershina UCJ № 8 / Vol. 88 salts of weak bases or alcohols. After that the sol was transformed into a gel by removing a part of water from it using heating and subse- quent extraction with the appropriate solvent. Obtained gel was used directly for the manu- facturing of films and monolithic products. Aerogels or xerogels (fragile microporous powder) were obtained after drying of the gel. Such powders were used for catalytically ac- tive indicator electrode formation. Samples of TiO2, RuO2 were made by the sol-gel method with drying at T = 320 °C for 50−60 minutes and further temperature processing at T = 400- 450 °C during 20 minutes. The surface morphology of TiO2 and TiO2/ RuO2 films was analyzed by SEM (JEOL JSM- 6060 LA) operated at 30 kV. A scanning elec- tron microscope (SEM) (Ultra 55 from ZEISS) equipped with an Energy Dispersive X-ray (EDX) analyzer was employed for the investi- gation of the obtained morphology including the diameter and length of the nano-tubular layer and changes in morphology, which may occur in the case of doping and/or heat treat- ment. A detailed investigation of the morpho logy and composition of the doped layers was carried out by transmission electron micros- copy (TEM). In addition, TEM investigations by means of bright/dark field were employed to determine the phase conditions of Ru doped TiO2. Impedance spectra were recorded from 0.001 to 1 MHz with no bias and limited volt- age (10 mV) as air was contacting with sensor samples. The impedance spectra were taken in a two-electrode cell using an Autolab30 elec- trochemical modular block (PGSTAT302N Metrohm Autolab) equipped with a FRA (Frequency Response Analyzer) assembly unit within the range from 10–2 to 106 Hz. The modular block was controlled by Autolab 4.9 according to the standard procedure. The spectral analysis, the equivalent circuit (EC) and the simulation of the EC were done with the software ZView 2,0 of Scribner Assoc. According to elemental analyses of samples, the growth of the thickness of RuO2 surface films increased the Ru amount in the coating by linear law (tab.1). So, it could be assumed that Ru plays the main role in the formation of the surface properties of obtained films. And the subsequent electrochemical studies of such systems showed the impact of film thickness on their electrochemical properties. Table 1. Elemental composition and thickness of the surface films. № Ti, mass % Ru, mass % Thickness of films, nm 1 100 0 – 2 99,97 0,017 0,5 3 99,89 0,098 5 4 99,15 0,836 95 The simulation of the film’s EIS spectrum determined that pure TiO2 had another equi valent circuit than TiO2/RuO2 systems. Such circuits are typical of the systems with sepa- rate bulk layers present between Ti/TiO2. In such case a double electrical layer (DEL) on the TiO2 surface is formed by the adsorption of oxygen, and the presence of oxygen created 100 ISSN 2708-129X. Укр. хім. журн., 2022 CORRELATION OF THE SURFACE STRUCTURE OF THE RuO2/Ti AND TiO2 /Ti FILMS WITH ELECTROCHEMICAL IMPEDANCE DATAPHISICAL CHEMISTRY an additional inductance element in the equi valent circuit [16, 17]. So, the presence of pa ramagnetic properties of adsorbed oxygen mo lecules formed an image of spectra (all spectra occurred in the positive part of the Nyquist plot) (fig. 1). Calculation of capacitance demonstrated linear dependence between the capacitance and thickness of RuO2 coatings. The maximum value of capacitance is exhibited by the sample with minimal thickness of the RuO2 film. Dur- ing growth of thickness, capacitance decreas- es. Minimum value was demonstrated by pure TiO2 film (table 2). Fig. 1 EIS spectra in Nyquist plots and equivalent circuits of the electrode samples: 1 – TiO2, 2−4 - TiO2/RuO2 with different thickness of coatings: 2 − 0,5 nm, 3 − 5 nm, 4 − 95 nm. Table 2 Relationship between the capacitance and thickness of RuO2 coatings № Thickness of films, nm Capacitance (C ), F 1 – 1,21 2 0,5 6,58 3 5 4,65 4 95 3,89 It is well known that equivalent circuit for the adsorption control of hydrogen in solu- tions [18] consists of CD- double-layer capaci tance RadH, CadH- resistance and capacitance of hydrogen adsorption Re-solution resistance (Fig. 2). Fig. 2. Equivalent circuit for adsorption control [18]. 101https://ucj.org.ua O. Linucheva, K. Pershina UCJ № 8 / Vol. 88 The same equivalent circuit was obtained for Ti/TiO2 sample. But for Ti/TiO2 and TiO2/ RuO2, samples in the presence of oxygen equivalent circuit transformed into another circuit with inductance and without second capacitance (fig1). The appearance of in- ductance in the equivalent circuits could be connected with adsorption of paramagnetic species, such as O2. So, the large frequency range of inductance indicates a big amount of adsorbed oxygen and large area of the elec- trode surface, which takes part in adsorption. Such behavior could be realized only in the presence of sufficient quantity of pores on the electrode surface. Moreover, the images of impedance spectrum according to [19] like images of porous electrodes with V-shaped pores (fig. 3). Fig. 3. Modes of porous electrode impedance spectrum with various forms of porous after Kaiser et al. [19]. It is well known that porous electrode is not ideal polarized electrode and has a tendency to dispersion of capacitance [20]. Fig. 3. Modes of porous electrode impedance spectrum with various forms of porous after Kaiser et al. [19]. It is well known that porous electrode is not ideal polarized electrode and has a tendency to dispersion of capacitance [20]. 𝐶𝐶(𝜔𝜔) = ([(𝑍𝑍𝑍𝑍) − 𝑍𝑍(𝜔𝜔 → ∞)]𝜔𝜔) (1) Such dispersion is the main characteristic of the surface morphology of an electrode. On the another hand, capacitance according to Kirchhoff’s circuit laws [19, 21] is the function of the currents in the electrical circuit nodes: 𝑑𝑑𝑢𝑢𝐶𝐶 𝑑𝑑𝑑𝑑 = 1 𝐶𝐶 (−𝑖𝑖2 + 𝑖𝑖1 + 𝐽𝐽) = 1 𝐶𝐶 (− 𝑢𝑢𝐶𝐶 𝑅𝑅2 + 𝑖𝑖1 + 𝐽𝐽) (2) So, the capacitance at fixed frequency could be used as second parameter for recognizing pore image. Moreover, by changing the frequency of alternating electric current it would be possible to obtain 3D fiber form of surface films (fig. 4−7). a b Fig. 4. SEM and EIS images for Ti/TiO2: a − SEM images; b – EIS images. a b Fig. 5. SEM and EIS images for TiO2/RuO2 (0,5 nм): a − SEM images; b – EIS images. a b Fig. 6. SEM and EIS images for TiO2/RuO2 (5 nм): a − SEM images; b – EIS images. (1) Such dispersion is the main characteristic of the surface morphology of an electrode. On the another hand, capacitance according to Kirchhoff ’s circuit laws [19, 21] is the function of the currents in the electrical circuit nodes: Fig. 3. Modes of porous electrode impedance spectrum with various forms of porous after Kaiser et al. [19]. It is well known that porous electrode is not ideal polarized electrode and has a tendency to dispersion of capacitance [20]. 𝐶𝐶(𝜔𝜔) = ([(𝑍𝑍𝑍𝑍) − 𝑍𝑍(𝜔𝜔 → ∞)]𝜔𝜔) (1) Such dispersion is the main characteristic of the surface morphology of an electrode. On the another hand, capacitance according to Kirchhoff’s circuit laws [19, 21] is the function of the currents in the electrical circuit nodes: 𝑑𝑑𝑢𝑢𝐶𝐶 𝑑𝑑𝑑𝑑 = 1 𝐶𝐶 (−𝑖𝑖2 + 𝑖𝑖1 + 𝐽𝐽) = 1 𝐶𝐶 (− 𝑢𝑢𝐶𝐶 𝑅𝑅2 + 𝑖𝑖1 + 𝐽𝐽) (2) So, the capacitance at fixed frequency could be used as second parameter for recognizing pore image. Moreover, by changing the frequency of alternating electric current it would be possible to obtain 3D fiber form of surface films (fig. 4−7). a b Fig. 4. SEM and EIS images for Ti/TiO2: a − SEM images; b – EIS images. a b Fig. 5. SEM and EIS images for TiO2/RuO2 (0,5 nм): a − SEM images; b – EIS images. a b Fig. 6. SEM and EIS images for TiO2/RuO2 (5 nм): a − SEM images; b – EIS images. (2) So, the capacitance at fixed frequency could be used as second parameter for recognizing pore image. Moreover, by changing the frequency of alternating electric current it would be pos- sible to obtain 3D fiber form of surface films (fig. 4−7). 102 ISSN 2708-129X. Укр. хім. журн., 2022 CORRELATION OF THE SURFACE STRUCTURE OF THE RuO2/Ti AND TiO2 /Ti FILMS WITH ELECTROCHEMICAL IMPEDANCE DATAPHISICAL CHEMISTRY a b Fig. 4. SEM and EIS images for Ti/TiO2: a − SEM images; b – EIS images. a b Fig. 5. SEM and EIS images for TiO2/RuO2 (0,5 nм): a − SEM images; b – EIS images. a b Fig. 6. SEM and EIS images for TiO2/RuO2 (5 nм): a − SEM images; b – EIS images. a b Fig. 7. SEM and EIS images for TiO2/RuO2 (95 nм): a − SEM images; b – EIS images. Fig. 3. Modes of porous electrode impedance spectrum with various forms of porous after Kaiser et al. [19]. It is well known that porous electrode is not ideal polarized electrode and has a tendency to dispersion of capacitance [20]. 𝐶𝐶(𝜔𝜔) = ([(𝑍𝑍𝑍𝑍) − 𝑍𝑍(𝜔𝜔 → ∞)]𝜔𝜔) (1) Such dispersion is the main characteristic of the surface morphology of an electrode. On the another hand, capacitance according to Kirchhoff’s circuit laws [19, 21] is the function of the currents in the electrical circuit nodes: 𝑑𝑑𝑢𝑢𝐶𝐶 𝑑𝑑𝑑𝑑 = 1 𝐶𝐶 (−𝑖𝑖2 + 𝑖𝑖1 + 𝐽𝐽) = 1 𝐶𝐶 (− 𝑢𝑢𝐶𝐶 𝑅𝑅2 + 𝑖𝑖1 + 𝐽𝐽) (2) So, the capacitance at fixed frequency could be used as second parameter for recognizing pore image. Moreover, by changing the frequency of alternating electric current it would be possible to obtain 3D fiber form of surface films (fig. 4−7). a b Fig. 4. SEM and EIS images for Ti/TiO2: a − SEM images; b – EIS images. a b Fig. 5. SEM and EIS images for TiO2/RuO2 (0,5 nм): a − SEM images; b – EIS images. a b Fig. 6. SEM and EIS images for TiO2/RuO2 (5 nм): a − SEM images; b – EIS images. Fig. 3. Modes of porous electrode impedance spectrum with various forms of porous after Kaiser et al. [19]. It is well known that porous electrode is not ideal polarized electrode and has a tendency to dispersion of capacitance [20]. 𝐶𝐶(𝜔𝜔) = ([(𝑍𝑍𝑍𝑍) − 𝑍𝑍(𝜔𝜔 → ∞)]𝜔𝜔) (1) Such dispersion is the main characteristic of the surface morphology of an electrode. On the another hand, capacitance according to Kirchhoff’s circuit laws [19, 21] is the function of the currents in the electrical circuit nodes: 𝑑𝑑𝑢𝑢𝐶𝐶 𝑑𝑑𝑑𝑑 = 1 𝐶𝐶 (−𝑖𝑖2 + 𝑖𝑖1 + 𝐽𝐽) = 1 𝐶𝐶 (− 𝑢𝑢𝐶𝐶 𝑅𝑅2 + 𝑖𝑖1 + 𝐽𝐽) (2) So, the capacitance at fixed frequency could be used as second parameter for recognizing pore image. Moreover, by changing the frequency of alternating electric current it would be possible to obtain 3D fiber form of surface films (fig. 4−7). a b Fig. 4. SEM and EIS images for Ti/TiO2: a − SEM images; b – EIS images. a b Fig. 5. SEM and EIS images for TiO2/RuO2 (0,5 nм): a − SEM images; b – EIS images. a b Fig. 6. SEM and EIS images for TiO2/RuO2 (5 nм): a − SEM images; b – EIS images. Fig. 3. Modes of porous electrode impedance spectrum with various forms of porous after Kaiser et al. [19]. It is well known that porous electrode is not ideal polarized electrode and has a tendency to dispersion of capacitance [20]. 𝐶𝐶(𝜔𝜔) = ([(𝑍𝑍𝑍𝑍) − 𝑍𝑍(𝜔𝜔 → ∞)]𝜔𝜔) (1) Such dispersion is the main characteristic of the surface morphology of an electrode. On the another hand, capacitance according to Kirchhoff’s circuit laws [19, 21] is the function of the currents in the electrical circuit nodes: 𝑑𝑑𝑢𝑢𝐶𝐶 𝑑𝑑𝑑𝑑 = 1 𝐶𝐶 (−𝑖𝑖2 + 𝑖𝑖1 + 𝐽𝐽) = 1 𝐶𝐶 (− 𝑢𝑢𝐶𝐶 𝑅𝑅2 + 𝑖𝑖1 + 𝐽𝐽) (2) So, the capacitance at fixed frequency could be used as second parameter for recognizing pore image. Moreover, by changing the frequency of alternating electric current it would be possible to obtain 3D fiber form of surface films (fig. 4−7). a b Fig. 4. SEM and EIS images for Ti/TiO2: a − SEM images; b – EIS images. a b Fig. 5. SEM and EIS images for TiO2/RuO2 (0,5 nм): a − SEM images; b – EIS images. a b Fig. 6. SEM and EIS images for TiO2/RuO2 (5 nм): a − SEM images; b – EIS images. Fig. 3. Modes of porous electrode impedance spectrum with various forms of porous after Kaiser et al. [19]. It is well known that porous electrode is not ideal polarized electrode and has a tendency to dispersion of capacitance [20]. 𝐶𝐶(𝜔𝜔) = ([(𝑍𝑍𝑍𝑍) − 𝑍𝑍(𝜔𝜔 → ∞)]𝜔𝜔) (1) Such dispersion is the main characteristic of the surface morphology of an electrode. On the another hand, capacitance according to Kirchhoff’s circuit laws [19, 21] is the function of the currents in the electrical circuit nodes: 𝑑𝑑𝑢𝑢𝐶𝐶 𝑑𝑑𝑑𝑑 = 1 𝐶𝐶 (−𝑖𝑖2 + 𝑖𝑖1 + 𝐽𝐽) = 1 𝐶𝐶 (− 𝑢𝑢𝐶𝐶 𝑅𝑅2 + 𝑖𝑖1 + 𝐽𝐽) (2) So, the capacitance at fixed frequency could be used as second parameter for recognizing pore image. Moreover, by changing the frequency of alternating electric current it would be possible to obtain 3D fiber form of surface films (fig. 4−7). a b Fig. 4. SEM and EIS images for Ti/TiO2: a − SEM images; b – EIS images. a b Fig. 5. SEM and EIS images for TiO2/RuO2 (0,5 nм): a − SEM images; b – EIS images. a b Fig. 6. SEM and EIS images for TiO2/RuO2 (5 nм): a − SEM images; b – EIS images. Fig. 3. Modes of porous electrode impedance spectrum with various forms of porous after Kaiser et al. [19]. It is well known that porous electrode is not ideal polarized electrode and has a tendency to dispersion of capacitance [20]. 𝐶𝐶(𝜔𝜔) = ([(𝑍𝑍𝑍𝑍) − 𝑍𝑍(𝜔𝜔 → ∞)]𝜔𝜔) (1) Such dispersion is the main characteristic of the surface morphology of an electrode. On the another hand, capacitance according to Kirchhoff’s circuit laws [19, 21] is the function of the currents in the electrical circuit nodes: 𝑑𝑑𝑢𝑢𝐶𝐶 𝑑𝑑𝑑𝑑 = 1 𝐶𝐶 (−𝑖𝑖2 + 𝑖𝑖1 + 𝐽𝐽) = 1 𝐶𝐶 (− 𝑢𝑢𝐶𝐶 𝑅𝑅2 + 𝑖𝑖1 + 𝐽𝐽) (2) So, the capacitance at fixed frequency could be used as second parameter for recognizing pore image. Moreover, by changing the frequency of alternating electric current it would be possible to obtain 3D fiber form of surface films (fig. 4−7). a b Fig. 4. SEM and EIS images for Ti/TiO2: a − SEM images; b – EIS images. a b Fig. 5. SEM and EIS images for TiO2/RuO2 (0,5 nм): a − SEM images; b – EIS images. a b Fig. 6. SEM and EIS images for TiO2/RuO2 (5 nм): a − SEM images; b – EIS images. Fig. 3. Modes of porous electrode impedance spectrum with various forms of porous after Kaiser et al. [19]. It is well known that porous electrode is not ideal polarized electrode and has a tendency to dispersion of capacitance [20]. 𝐶𝐶(𝜔𝜔) = ([(𝑍𝑍𝑍𝑍) − 𝑍𝑍(𝜔𝜔 → ∞)]𝜔𝜔) (1) Such dispersion is the main characteristic of the surface morphology of an electrode. On the another hand, capacitance according to Kirchhoff’s circuit laws [19, 21] is the function of the currents in the electrical circuit nodes: 𝑑𝑑𝑢𝑢𝐶𝐶 𝑑𝑑𝑑𝑑 = 1 𝐶𝐶 (−𝑖𝑖2 + 𝑖𝑖1 + 𝐽𝐽) = 1 𝐶𝐶 (− 𝑢𝑢𝐶𝐶 𝑅𝑅2 + 𝑖𝑖1 + 𝐽𝐽) (2) So, the capacitance at fixed frequency could be used as second parameter for recognizing pore image. Moreover, by changing the frequency of alternating electric current it would be possible to obtain 3D fiber form of surface films (fig. 4−7). a b Fig. 4. SEM and EIS images for Ti/TiO2: a − SEM images; b – EIS images. a b Fig. 5. SEM and EIS images for TiO2/RuO2 (0,5 nм): a − SEM images; b – EIS images. a b Fig. 6. SEM and EIS images for TiO2/RuO2 (5 nм): a − SEM images; b – EIS images. The obtained images (fig. 4−7) showed that Ti/TiO2 sample has rectangular-shaped pores with small amount of V-shaped pores on the top piece of surface (fig. 4 b). On the another hand, all the TiO2/RuO2 samples have the different levels of surface volume (fig. 5−7, b). The number of V-shaped pores on the top piece of surface increases during growth of RuO2 film thickness and has a maximum at maximum thickness and Ru concentration (fig 7.b). Matching the value of capacitance and the presence of rectangular-shaped and V-shaped pores on the boundary of titanium base and oxide film the following dependence of capacitance decrease was shown: large V-shaped pores on the boundary of titanium base and oxide film and on the surface of film > small V-shaped pores on the boundary of titanium base and oxide film, and large pores on the surface of film > rectangular-shaped pores on the boundary of titanium base and oxide film and small V-shaped pores on the surface of film. So, the decrease in of capacitance would be connected with increase in the absorption of oxygen due to the presence of various types of pores and their organization and a decrease in adsorption (fig. 8). In this case, reversible adsorption-absorption processes on the surface are retarded the electrode could lose sensitivity and considerably increase the time of sensor relaxation. Thus by selection of the film’s content, it could be possible to regulate the technical data of sensors by changing properties of the adsorption component (properly sensor) [1] and absorption component (microgenerator) [22]. a b Fig. 7. SEM and EIS images for TiO2/RuO2 (95 nм): a − SEM images; b – EIS images. The obtained images (fig. 4−7) showed that Ti/TiO2 sample has rectangular-shaped pores with small amount of V-shaped pores on the top piece of surface (fig. 4 b). On the another hand, all the TiO2/RuO2 samples have the different levels of surface volume (fig. 5−7, b). The number of V-shaped pores on the top piece of surface increases during growth of RuO2 film thickness and has a maximum at maximum thickness and Ru concentration (fig 7.b). Matching the value of capacitance and the presence of rectangular-shaped and V-shaped pores on the boundary of titanium base and oxide film the following dependence of capacitance decrease was shown: large V-shaped pores on the boundary of titanium base and oxide film and on the surface of film > small V-shaped pores on the boundary of titanium base and oxide film, and large pores on the surface of film > rectangular-shaped pores on the boundary of titanium base and oxide film and small V-shaped pores on the surface of film. So, the decrease in of capacitance would be connected with increase in the absorption of oxygen due to the presence of various types of pores and their organization and a decrease in adsorption (fig. 8). In this case, reversible adsorption-absorption processes on the surface are retarded the electrode could lose sensitivity and considerably increase the time of sensor relaxation. Thus by selection of the film’s content, it could be possible to regulate the technical data of sensors by changing properties of the adsorption component (properly sensor) [1] and absorption component (microgenerator) [22]. a b Fig. 7. SEM and EIS images for TiO2/RuO2 (95 nм): a − SEM images; b – EIS images. 103https://ucj.org.ua O. Linucheva, K. Pershina UCJ № 8 / Vol. 88 The obtained images (fig. 4−7) showed that Ti/TiO2 sample has rectangular-shaped pores with small amount of V-shaped pores on the top piece of surface (fig. 4 b). On the another hand, all the TiO2/RuO2 samples have the dif- ferent levels of surface volume (fig. 5−7, b). The number of V-shaped pores on the top piece of surface increases during growth of RuO2 film thickness and has a maximum at maximum thickness and Ru concentration (fig 7.b). Matching the value of capacitance and the presence of rectangular-shaped and V-shaped pores on the boundary of titanium base and oxide film the following dependence of ca- pacitance decrease was shown: large V-shaped pores on the boundary of titanium base and oxide film and on the surface of film > small V-shaped pores on the boundary of titanium base and oxide film, and large pores on the sur- face of film > rectangular-shaped pores on the boundary of titanium base and oxide film and small V-shaped pores on the surface of film. So, the decrease in of capacitance would be connected with increase in the absorption of oxygen due to the presence of various types of pores and their organization and a decrease in adsorption (fig. 8). In this case, reversible ad- sorption-absorption processes on the surface are retarded the electrode could lose sensitivity and considerably increase the time of sensor relaxation. Thus by selection of the film’s con- tent, it could be possible to regulate the tech- nical data of sensors by changing properties of the adsorption component (properly sensor) [1] and absorption component (microgenera- tor) [22]. Fig. 8. Scheme of the adsorption - absorption ratio changing in relation to the film pore’s structure. 104 ISSN 2708-129X. Укр. хім. журн., 2022 CORRELATION OF THE SURFACE STRUCTURE OF THE RuO2/Ti AND TiO2 /Ti FILMS WITH ELECTROCHEMICAL IMPEDANCE DATAPHISICAL CHEMISTRY CONCLUSIONS. The study of the compo- sition, morphological structure and electro- chemical behaviour of RuO2/Ti and TiO2 /Ti films determined the impact of the pore shape of surface films on the adsorption-absorption ratio of oxygen, which regulated technical data of sensors. By changing the capacitance and capacitance dispersion in a wide frequency range, it was proposed to obtain 3D images of the surface. It was found that decrease of DEL capacitance has following relationships: large V-shaped pores on the boundary of titanium base and oxide film and on the surface of film > small V-shaped pores on the boundary of ti- tanium base and oxide film, and large pores on the surface of film > rectangular-shaped pores on the boundary of titanium base and oxide film and small V-shaped pores on the surface of film. The formation of the pore geometry and surface structure is dependent on the ra- tion of ruthenium and the thickness of films. So, it is possible to change the morphological and electrochemical properties of sensors by the regulation of ruthenium content. ACKNOWLEDGMENT. This work was supported by the Na- tional Technical University of Ukraine “Igor Sikorsky Kyiv Polytechnic Insti- tute”, and National Academy of Sci- ence of Ukraine. КОРЕЛЯЦІЯ МІЖ ПОВЕРХНЕВОЮ СТРУКТУ- РОЮ ПЛІВОК RuO2/Ti І TiO2/Ti З ДАНИМИ ЕЛЕКТРОХІМІЧНОГО ІМПЕДАНСУ О. В. Лінючева1, К. Д. Першина2 1Національний технічний університет Ук раїни «Київський політехнічний інститут імені Ігоря Сікорського», пр. Перемоги, 37, корп. 4, Київ 03056, Ук раїна; 2Інститут загальної та неорганічної хімії ім. В. І. Вернадського НАН України, пр. Акад. Палладіна, 32/34, Київ 03142, Україна Обговорено структуру поверхні та ха- рактер формування ємності плівок RuO2/Ti та TiO2/Ti. Описано фактори, що вплива- ють на оборотність процесів адсорбції-аб- сорбції кисню на поверхні плівок RuO2/Ti та TiO2/Ti. Вплив геометрії пор, вмісту рутенію, товщини плівок і величини ємно- сті оксидних плівок досліджували за допо- могою електронної мікроскопії та спектро скопії електрохімічного імпедансу. За допо могою електронної мікроскопії фіксували зміни вмісту пор та їхні геометрії залеж- но від концентрації Ru. Зміну ємності та дисперсію ємності в широкому діапазоні частот було використано для отримання 3D-зображень поверхні плівки. Запропоно- вано схему зміни співвідношення адсорб ції-абсорбції кисню залежно від структури пор плівок. Ключові слова: рутеній, титан, поверх- нева плівка, геометрія пор, ємність, чутли- вість. 105https://ucj.org.ua O. Linucheva, K. Pershina UCJ № 8 / Vol. 88 REFERENCES 1 Neri G. First fifty years of chemoresistive gas sensors. Chemosensors. 3(1): 1−20. 2 Sirelkhatim, A., Mahmud, S., Seeni, A., Kaus, N. H. M., Ann, L. C., Bakhori, S. K. M. ... & Mohamad D. Review on zinc oxide nanoparti- cles: antibacterial activity and toxicity mecha- nism. Nano-micro letters. 2015. 7(3): 219−242. 3 Cheng S., Liu H., Hu S., Zhang D., & Ning, H. A survey on gas sensing technology Xiao Liu. Sensors. 2012. 12: 9635−9665. 4 Zhang J., Hu J. Q., Zhu F. R., Gong H. & O’shea S. J. Quartz crystal microbalance coated with sol-gel-derived thin films as gas sensor for no detection. Sensors, 2003. 3 (10): 404−414. 5 Wisitsoraat A., Tuantranont A., Comini E., Sberveglieri G. & Wlodarski W. (2009). Char- acterization of n-type and p-type semiconduc- tor gas sensors based on NiOx doped TiO2 thin films. Thin Solid Films. 517(8): 2775−2780. 6 Yamazoe N., & Shimanoe K. Theory of po wer laws for semiconductor gas sensors. Sen- sors and Actuators B: Chemical. 2008. 128(2): 566−573. 7 Maskell, W. C. Inorganic solid state chemically sensitive devices: electrochemical oxygen gas sensors. Journal of Physics E: Scientific Instru- ments. 1987. 20(10). 1156. 8 Sardarinejad A., Maurya D. K. & Alameh K. The pH sensing properties of RF sputtered RuO2 thin-film prepared using different Ar/O2 flow ratio. Materials. 2015. 8(6): 3352−3363. 9 Fine G. F., Cavanagh L. M., Afonja A. & Binions R. Metal oxide semi-conductor gas sensors in environmental monitoring.  Sen- sors. 2010. 10(6): 5469−5502. 10 Wang H., Chen L., Wang J., Sun Q. & Zhao Y. A micro oxygen sensor based on a nano sol-gel TiO2 thin film.  Sensors,  14(9). 2014. 16423−16433. 11 Francioso L., Presicce D. S., Siciliano P. & Fi- carella A. Combustion conditions discrimi nation properties of Pt-doped TiO2 thin film oxygen sensor.  Sensors and Actuators B: Chemical. 2007. 123(1): 516−521. 12 Kim Y. D., Seitsonen A. P., Wendt S., Wang J., Fan C., Jacobi K. … & Ertl G. Characterization of various oxygen species on an oxide surface: RuO2 (110). The Journal of Physical Chemistry B. 2001. 105(18): 3752−3758. 13 Over Y. D., Kim A. P., Seitsonen S. W. & Wendt S. E. Lundgren, M. Schmid, P. Varga, A. Mor- gante and G. Ertl. Science. 2000. 287(54−57). 1474. 14 Jakob P. & Schlapka A. CO adsorption on epi- taxially grown Pt layers on Ru (0 0 0 1). Surface science. 2007. 601(17): 3556−3568. 15 Martı́nez-Máñez R., Soto J., Lizondo-Sabater J., Garcıá-Breijo E., Gil L., Ibáñez J. ... & Alva- rez S. New potentiomentric dissolved oxygen sensors in thick film technology. Sensors and Actuators B: Chemical. 2004. 101(3): 295−301. 16 Harrington D. A. & Den Driessche V. P. Mech- anism and equivalent circuits in electrochem- ical impedance spectroscopy.  Electrochimica Acta. 2011. 56. 8005−8013. 17 Riabokin O. L., Boichuk A. V. & Pershina K.  D. Control of the State of Primary Alka- line Zn–MnO2 Cells Using the Electrochemi cal Impedance Spectroscopy Method. Surface Engineering and Applied Electrochemistry. 2018. 54(6): 614−622. 18 Oelgeklaus R., Rose J. & Baltruschat H. On the rate of hydrogen and iodine adsorption on polycrystalline Pt and Pt (111). Journal of Electroanalytical Chemistry. 1994.  376(1−2): 127−133. 19 Macdonald, D. D. 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spelling oai:ojs2.1444248.nisspano.web.hosting-test.net:article-4752026-07-22T08:23:50Z CORRELATION OF THE SURFACE STRUCTURE OF THE RuO2/Ti AND TiO2 /Ti FILMS WITH ELECTROCHEMICAL IMPEDANCE DATA Linyucheva, Olga Pershina, Katherine ruthenium, titanium, surface film, pore geometry, capacitance, sensitivity. The surface structure and nature of the capacitance formation of RuO2/Ti and TiO2 /Ti films are discussed. The factors affecting the reversibility of the adsorption-desorption processes of oxygen on the surface of RuO2/Ti and TiO2 /Ti films are described. The influence of the geometry of the pore, ruthenium content, thickness of the films, and the capacitance value of oxide films was studied using electron microscopy and electrochemical impedance spectroscopy. The changes in pore content and their geometry depending on Ru concentration are fixed by electron microscopy. The changing capacitance and capacitance dispersion in a wide frequency range was used to obtain 3D images of the film's surface. A scheme of the adsorption-absorption ratio changing in relation to the pore’s structure of the films was proposed. The study of the composition, morphological structure and electrochemical behaviour of RuO2/Ti and TiO2 /Ti films determined the impact of the pore shape of surface films on the adsorption-absorption ratio of oxygen, which regulated technical data of sensors. By changing the capacitance and capacitance dispersion in a wide frequency range, it was proposed to obtain 3D images of the surface. It was found that decrease of DEL capacitance has following relationships: large V-shaped pores on the boundary of titanium base and oxide film and on the surface of film > small V-shaped pores on the boundary of titanium base and oxide film, and large pores on the surface of film > rectangular-shaped pores on the boundary of titanium base and oxide film and small V-shaped pores on the surface of film. The formation of the pore geometry and surface structure is dependent on the ration of ruthenium and the thickness of films. So, it is possible to change the morphological and electrochemical properties of sensors by the regulation of ruthenium content. V.I.Vernadsky Institute of General and Inorganic Chemistry 2022-09-26 Article Article Physical chemistry Физическая xимия Фізична xімія application/pdf https://ucj.org.ua/index.php/journal/article/view/475 10.33609/2708-129X.88.08.2022.97-105 Ukrainian Chemistry Journal; Vol. 88 No. 8 (2022): Ukrainian Chemistry Journal; 97-105 Украинский химический журнал; ##issue.vol## 88 ##issue.no## 8 (2022): Ukrainian Chemistry Journal; 97-105 Український хімічний журнал; Том 88 № 8 (2022): Український хімічний журнал; 97-105 2708-129X 2708-1281 en https://ucj.org.ua/index.php/journal/article/view/475/244 Copyright (c) 2022 Olga Linyucheva, Katherine Pershina https://creativecommons.org/licenses/by-nc/4.0
spellingShingle Linyucheva, Olga
Pershina, Katherine
CORRELATION OF THE SURFACE STRUCTURE OF THE RuO2/Ti AND TiO2 /Ti FILMS WITH ELECTROCHEMICAL IMPEDANCE DATA
title CORRELATION OF THE SURFACE STRUCTURE OF THE RuO2/Ti AND TiO2 /Ti FILMS WITH ELECTROCHEMICAL IMPEDANCE DATA
title_full CORRELATION OF THE SURFACE STRUCTURE OF THE RuO2/Ti AND TiO2 /Ti FILMS WITH ELECTROCHEMICAL IMPEDANCE DATA
title_fullStr CORRELATION OF THE SURFACE STRUCTURE OF THE RuO2/Ti AND TiO2 /Ti FILMS WITH ELECTROCHEMICAL IMPEDANCE DATA
title_full_unstemmed CORRELATION OF THE SURFACE STRUCTURE OF THE RuO2/Ti AND TiO2 /Ti FILMS WITH ELECTROCHEMICAL IMPEDANCE DATA
title_short CORRELATION OF THE SURFACE STRUCTURE OF THE RuO2/Ti AND TiO2 /Ti FILMS WITH ELECTROCHEMICAL IMPEDANCE DATA
title_sort correlation of the surface structure of the ruo2/ti and tio2 /ti films with electrochemical impedance data
topic_facet ruthenium
titanium
surface film
pore geometry
capacitance
sensitivity.
url https://ucj.org.ua/index.php/journal/article/view/475
work_keys_str_mv AT linyuchevaolga correlationofthesurfacestructureoftheruo2tiandtio2tifilmswithelectrochemicalimpedancedata
AT pershinakatherine correlationofthesurfacestructureoftheruo2tiandtio2tifilmswithelectrochemicalimpedancedata