ПОЛІРУВАННЯ ДЕТАЛЕЙ ОПТОТЕХНІКИ З НАПІВПРОВІДНИКОВИХ МАТЕРІАЛІВ
The purpose of this work is to study the mechanism of polishing of optotechnics parts from semiconductor materials using dispersed systems of micro- and nanopowders and to study the patterns of removal of the processed material and the formation of the nanoprofile of the polished surface. As a resul...
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| Date: | 2025 |
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| Main Authors: | , , , , , , , , |
| Format: | Article |
| Language: | Ukrainian |
| Published: |
Институт сверхтвердых материалов им. В. Н. Бакуля Национальной академии наук Украины
2025
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| Subjects: | |
| Online Access: | http://altis-ism.org.ua/index.php/ALTIS/article/view/387 |
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| Journal Title: | Tooling materials science |