МОДЕРНІЗОВАНА УСТАНОВКА ВУ 700 ДЛЯ НАПИЛЕННЯ ФУНКЦІОНАЛЬНИХ ВАКУУМНИХ ПОКРИТТІВ
Purpose. Improvement of the VU 700 vacuum unit for applying a wide range of coatings, including multilayer and multicomponent coatings, and analysis of its performance indicators. Methodology. The installation includes a linear magnetron, three linear arc tubes, a cathode power supply for glow disch...
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| Datum: | 2025 |
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| Hauptverfasser: | , , |
| Format: | Artikel |
| Sprache: | Ukrainisch |
| Veröffentlicht: |
Институт сверхтвердых материалов им. В. Н. Бакуля Национальной академии наук Украины
2025
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| Online Zugang: | http://altis-ism.org.ua/index.php/ALTIS/article/view/441 |
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| Назва журналу: | Tooling materials science |
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Tooling materials science| Zusammenfassung: | Purpose. Improvement of the VU 700 vacuum unit for applying a wide range of coatings, including multilayer and multicomponent coatings, and analysis of its performance indicators.
Methodology. The installation includes a linear magnetron, three linear arc tubes, a cathode power supply for glow discharge and supplying a constant bias potential to products for CIB and supplying a bias potential during coating deposition, a 6-position double planetary rotation system, an electric heater, and a system for protecting the viewing window from dust during the coating process. The performance of the installation was evaluated during the formation of coatings using linear arctrons made of titanium and NiCrAlY alloy.
Findings. Taking into account the main features of the microelectroarc vacuum deposition process, the VU 700 vacuum unit was upgraded. It has been shown that during the condensation of the coating in micro-electro-arc vacuum spraying of a titanium cathode using high-frequency displacement potential, it is not the value of the displacement potential in the pulse that is important, but the value of the effective high-frequency displacement voltage.  When using a linear arc tube made of a multicomponent NiCrAlY alloy, the coating is reliable at an arc current of 90–120 A.
Application. The results of the work are relevant for the development of technologies for applying functional coatings with different structures – simple single-layer and multi-component multi-layer coatings. Future research may focus on optimizing the chemical composition of coatings for a specific area of application.
Practical value and originality. The study shows that the modernized installation can be effectively used to obtain a wide range of coatings for various purposes. The originality of the development is associated with the hybrid design of the installation and the presence of four cathodes in it. |
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