ДОСЛІДЖЕННЯ СТАНУ РОБОЧОЇ ПОВЕРХНІ ІНСТРУМЕНТУ ПРИ ПОЛІРУВАННІ ПІДКЛАДОК З НІТРИДУ АЛЮМІНІЮ

• Datum: 2018
• Hauptverfasser: Філатов, Ю. Д., Сидорко, В. І., Ковальов, С. В., Ковальов, В. А., Юрчишин, О. Я., Данильченко, М. А., Вєтров, А. Г.
• Format: Artikel
• Sprache: Ukrainian
• Veröffentlicht: Институт сверхтвердых материалов им. В. Н. Бакуля Национальной академии наук Украины 2018
• Schlagworte: полірування; нітрид алюмінію; частинки шламу; частинки зносу полірувального порошку
• Online Zugang: http://altis-ism.org.ua/index.php/ALTIS/article/view/79
• Назва журналу: Tooling materials science

The purose of this study is to study the mechanism of interaction of sludge particles and wear of a polishing powder when polishing substrates of ceramics based on aluminum nitride using a suspension of boron nitride KM 0.5 / 0 powders. On the basis of the quantum mechanical theory of particle scattering, the total effective scattering cross-section of slime and wear particles is calculated that characterizes the probability of scattering of particles in the direction of the working surface of the lap and the function of its distribution, depending on the radius of the circular zones of the surface of the lapping. It has been experimentally established that the fragments of the plaque from the particles of slime and wear are located in a circular zone whose dimensions and coordinates of the location practically coincide with those calculated theoretically. The results of the study can be used to analyze the polishing of nonmetallic materials with the help of suspensions from different polishing powders, which is of great practical importance, especially in the development of technological processes for finishing parts of electronic equipment and optical systems of glass, ceramics, glass, optical and semiconductor crystals. A special value of the study is the ability to predict the performance of new polishing suspensions using specific lap materials