ДІОДНІ СЕНСОРИ ВОЛОГОСТІ НА ОСНОВІ КРЕМНІЄВИХ 1D НАНОРОЗМІРНИХ СТРУКТУР
Introduction. Humidity measurement is essential in microelectronics, aerospace, biomedical, and food industries, as well as in households for climate control. Currently, various types of devices have been used as humidity sensors: capacitive, resistive, diode, gravimetric, optical structures, field-...
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| Date: | 2024 |
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| Main Authors: | , , , |
| Format: | Article |
| Language: | English |
| Published: |
PH “Akademperiodyka”
2024
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| Subjects: | |
| Online Access: | https://scinn-eng.org.ua/ojs/index.php/ni/article/view/560 |
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| Journal Title: | Science and Innovation |