Многофункциональный датчик давления и температуры на основе твердых растворов SiGe
A multifunctional pressure and temperature sensor has been developed with digital signal processing that includes filtering, linearization, and temperature correction of the pressure transducer characteristics. As the sensitive element of the sensor, a strain gauge bridge consisting of strain resist...
Збережено в:
| Дата: | 2005 |
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| Автори: | , , , |
| Формат: | Стаття |
| Мова: | Українська |
| Опубліковано: |
PE "Politekhperiodika", Book and Journal Publishers
2005
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| Теми: | |
| Онлайн доступ: | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2005.6.24 |
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| Назва журналу: | Technology and design in electronic equipment |
Репозитарії
Technology and design in electronic equipment| Резюме: | A multifunctional pressure and temperature sensor has been developed with digital signal processing that includes filtering, linearization, and temperature correction of the pressure transducer characteristics. As the sensitive element of the sensor, a strain gauge bridge consisting of strain resistors based on whisker crystals of the Si₁₋ₓGeₓ solid solution is used. |
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