СВЧ плазмохимическое осаждение структур для высокоапертурных планарных оптических волноводов

• Datum: 2005
• Hauptverfasser: Grigorjantz, V. V., Dolgov, A. P., Kochmarev, L. Yu., Shilov, I. P.
• Format: Artikel
• Sprache: Ukrainisch
• Veröffentlicht: PE "Politekhperiodika", Book and Journal Publishers 2005
• Schlagworte: планарный оптический волновод; СВЧ-разряд; волноводный СВЧ-плазмотрон
• Online Zugang: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2005.6.39
• Назва журналу: Technology and design in electronic equipment

The features of forming planar optical waveguides based on quartz glass in a waveguide-type microwave plasmatron operating in the H10 mode have been studied. The proposed microwave discharge excitation device has demonstrated its effectiveness in the development of optical structures of the composit...