Ударостойкие защитные пленочные покрытия на основе AlN в электронной технике

• Date: 2005
• Main Authors: Belyanin, A. F., Samoylovich, M. I., Jitkovsky, V. D., Kameneva, A. L.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2005
• Subjects: термозащитные пленочные покрытия на основе AlN; магнетронное распыление; устройства термопечати
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2005.5.35
• Journal Title: Technology and design in electronic equipment

For the formation of AlN protective coatings resistant to impact loads, magnetron and diode sputtering methods, as well as ion beam sputtering, are suitable. Depending on the process conditions, different contents of X-ray amorphous and crystalline phases are obtained in the volume of nanostructured...