Технологические предпосылки создания МОП-структур с малыми проектными нормами

• Date: 2005
• Main Author: Baranov, V. V.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2005
• Subjects: твердотельные структуры типа МОП; физико-технологические ограничения; самосовмещенная технология; переходные металлы; силициды
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2005.5.42
• Journal Title: Technology and design in electronic equipment

Physico-technological limitations in the formation of various types of solid-state MOS structures within silicon VLSI and LSI are considered. The possibilities of improving their manufacturability are shown, based on self-aligned processes for forming thin-film structures, including the use of solid...