Сетевая система контроля технологического процесса выращивания полупроводниковых кристаллов и тонких пленок

A model of a technological network has been proposed and software developed for monitoring parameters and controlling the modes of the technological process of semiconductor crystal and thin-film growth. DLL libraries have been created to provide communication between the client and server parts of...

Full description

Saved in:
Bibliographic Details
Date:2005
Main Authors: Rogov, R. V., Melnychuk, S. V., Vorobets, G. I.
Format: Article
Language:Ukrainian
Published: PE "Politekhperiodika", Book and Journal Publishers 2005
Subjects:
Online Access:https://www.tkea.com.ua/index.php/journal/article/view/TKEA2005.5.52
Tags: Add Tag
No Tags, Be the first to tag this record!
Journal Title:Technology and design in electronic equipment

Institution

Technology and design in electronic equipment