Получение наноструктурированных пленок AlN и ZnO и их применение в электронной технике
The design features of the sputtering system in a magnetron sputtering installation and the conditions for forming AlN and ZnO films with controlled composition and crystalline phase structure are considered. The conditions for obtaining and the operational characteristics of layered structures in...
Збережено в:
| Дата: | 2005 |
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| Автори: | , , , |
| Формат: | Стаття |
| Мова: | Українська |
| Опубліковано: |
PE "Politekhperiodika", Book and Journal Publishers
2005
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| Теми: | |
| Онлайн доступ: | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2005.4.46 |
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| Назва журналу: | Technology and design in electronic equipment |
Репозитарії
Technology and design in electronic equipment| Резюме: | The design features of the sputtering system in a magnetron sputtering installation and the conditions for forming AlN and ZnO films with controlled composition and crystalline phase structure are considered. The conditions for obtaining and the operational characteristics of layered structures including AlN, ZnO, diamond, and diamond-like carbon layers are demonstrated in their application to acoustic and emission electronics.
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