Технология получения пленок силицида палладия для мощных диодов Шоттки

• Date: 2005
• Main Authors: Anufriev, L. P., Baranov, V. V., Solovjov, J. A., Tarasikov, M. V.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2005
• Subjects: диоды Шоттки; силицид палладия; термическое испарение; вольт-амперные характеристики
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2005.4.55
• Journal Title: Technology and design in electronic equipment

A technology is proposed for forming transition layers of palladium silicide through a solid-phase reaction of a palladium film with a silicon substrate directly during deposition, without the need for subsequent thermal treatment. Studies of the elemental composition and crystalline structure of...