Buchumschlag

Применение феррогранатовых эпитаксиальных структур в сверхвысокочастотной электронике

Single-crystal iron-yttrium garnet (IYG) films with thicknesses ranging from a few micrometers to 92 μm were grown using the liquid-phase epitaxy method. Three methods of etching FeYG films were used to fabricate devices based on magnetostatic waves: ion etching, liquid-chemical etching, and laser-i...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Datum:2005
Hauptverfasser: Yushchuk, S. I., Yuryev, S. A., Kostyuk, P. S., Bondar, V. I.
Format: Artikel
Sprache:Ukrainisch
Veröffentlicht: PE "Politekhperiodika", Book and Journal Publishers 2005
Schlagworte:
феррогранатовые эпитаксиальные структуры
резонаторы
СВЧ
магнитостатические волны
методы травления
Online Zugang:https://www.tkea.com.ua/index.php/journal/article/view/TKEA2005.3.22
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Назва журналу:Technology and design in electronic equipment

Institution

Technology and design in electronic equipment
Beschreibung
Zusammenfassung:Single-crystal iron-yttrium garnet (IYG) films with thicknesses ranging from a few micrometers to 92 μm were grown using the liquid-phase epitaxy method. Three methods of etching FeYG films were used to fabricate devices based on magnetostatic waves: ion etching, liquid-chemical etching, and laser-induced etching. The developed waveguide structures and resonators were used to create planar microwave filters and delay lines.

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