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Применение феррогранатовых эпитаксиальных структур в сверхвысокочастотной электронике

Single-crystal iron-yttrium garnet (IYG) films with thicknesses ranging from a few micrometers to 92 μm were grown using the liquid-phase epitaxy method. Three methods of etching FeYG films were used to fabricate devices based on magnetostatic waves: ion etching, liquid-chemical etching, and laser-i...

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Bibliographic Details
Date:2005
Main Authors: Yushchuk, S. I., Yuryev, S. A., Kostyuk, P. S., Bondar, V. I.
Format: Article
Language:Ukrainian
Published: PE "Politekhperiodika", Book and Journal Publishers 2005
Subjects:
феррогранатовые эпитаксиальные структуры
резонаторы
СВЧ
магнитостатические волны
методы травления
Online Access:https://www.tkea.com.ua/index.php/journal/article/view/TKEA2005.3.22
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Journal Title:Technology and design in electronic equipment

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Technology and design in electronic equipment
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Summary:Single-crystal iron-yttrium garnet (IYG) films with thicknesses ranging from a few micrometers to 92 μm were grown using the liquid-phase epitaxy method. Three methods of etching FeYG films were used to fabricate devices based on magnetostatic waves: ion etching, liquid-chemical etching, and laser-induced etching. The developed waveguide structures and resonators were used to create planar microwave filters and delay lines.

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