Применение феррогранатовых эпитаксиальных структур в сверхвысокочастотной электронике

• Date: 2005
• Main Authors: Yushchuk, S. I., Yuryev, S. A., Kostyuk, P. S., Bondar, V. I.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2005
• Subjects: феррогранатовые эпитаксиальные структуры; резонаторы; СВЧ; магнитостатические волны; методы травления
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2005.3.22
• Journal Title: Technology and design in electronic equipment

Single-crystal iron-yttrium garnet (IYG) films with thicknesses ranging from a few micrometers to 92 μm were grown using the liquid-phase epitaxy method. Three methods of etching FeYG films were used to fabricate devices based on magnetostatic waves: ion etching, liquid-chemical etching, and laser-i...