Лазерное текстурирование поверхности предварительно нагретого монокристалла кремния

• Date: 2005
• Main Author: Krapivko, H. I.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2005
• Subjects: лазерное воздействие; кремний; текстурирование поверхности
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2005.2.53
• Journal Title: Technology and design in electronic equipment

A method of laser engraving based on effective modification of the crystal lattice during the formation of a textured silicon crystal surface has been implemented. It is shown that for burning silicon at the phase transition, a laser with pulse power much lower than that required in the solid phas...