Лазерное текстурирование поверхности предварительно нагретого монокристалла кремния
A method of laser engraving based on effective modification of the crystal lattice during the formation of a textured silicon crystal surface has been implemented. It is shown that for burning silicon at the phase transition, a laser with pulse power much lower than that required in the solid phas...
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| Datum: | 2005 |
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| 1. Verfasser: | |
| Format: | Artikel |
| Sprache: | Ukrainisch |
| Veröffentlicht: |
PE "Politekhperiodika", Book and Journal Publishers
2005
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| Schlagworte: | |
| Online Zugang: | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2005.2.53 |
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| Назва журналу: | Technology and design in electronic equipment |