Лазерное текстурирование поверхности предварительно нагретого монокристалла кремния
A method of laser engraving based on effective modification of the crystal lattice during the formation of a textured silicon crystal surface has been implemented. It is shown that for burning silicon at the phase transition, a laser with pulse power much lower than that required in the solid phas...
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| Date: | 2005 |
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| Main Author: | |
| Format: | Article |
| Language: | Ukrainian |
| Published: |
PE "Politekhperiodika", Book and Journal Publishers
2005
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| Subjects: | |
| Online Access: | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2005.2.53 |
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| Journal Title: | Technology and design in electronic equipment |