Получение и свойства пористого карбида кремния

• Date: 2005
• Main Authors: Svetlichnaya, L. A., Moskovchenko, N. N., Serba, P. V.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2005
• Subjects: пористый карбид кремния; электрохимическое травление; морфология пористого слоя; размер пор; эпитаксиальный слой SiC
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2005.1.53
• Journal Title: Technology and design in electronic equipment

The methods of obtaining porous silicon carbide, its properties, and the influence of electrolyte composition, etching time, and current density on the morphology of the porous layer are discussed, as well as the dependence of pore structure on substrate doping. The results are compared with data on...