Компенсация систематических погрешностей тонкопленочных элементов через элементы фотошаблона

• Date: 2004
• Main Author: Spirin, V. G.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2004
• Subjects: компенсация систематических погрешностей; тонкопленочные элементы; выход годных микросборок
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2004.4.09
• Journal Title: Technology and design in electronic equipment

Several methods are considered for compensating for systematic errors in the design parameters of thin-film resistors that determine the yield of functional microassemblies. A method of compensation is proposed by modifying the dimensions of photomask elements according to specific algorithms, which...