Компенсация систематических погрешностей тонкопленочных элементов через элементы фотошаблона

Several methods are considered for compensating for systematic errors in the design parameters of thin-film resistors that determine the yield of functional microassemblies. A method of compensation is proposed by modifying the dimensions of photomask elements according to specific algorithms, which...

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Bibliographische Detailangaben
Datum:2004
1. Verfasser: Spirin, V. G.
Format: Artikel
Sprache:Ukrainisch
Veröffentlicht: PE "Politekhperiodika", Book and Journal Publishers 2004
Schlagworte:
Online Zugang:https://www.tkea.com.ua/index.php/journal/article/view/TKEA2004.4.09
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Назва журналу:Technology and design in electronic equipment

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Technology and design in electronic equipment