Акустостимулированное понижение температуры отжига радиационных дефектов в кристаллах Ge

• Date: 2004
• Main Authors: Olikh, Ja. M., Lysiuk, I. O., Tymochko, M. D.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2004
• Subjects: ультразвуковое воздействие; изохронный отжиг; нейтронно легированный германий; радиационные дефекты
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2004.3.09
• Journal Title: Technology and design in electronic equipment

ultrasonic treatment, isochronous annealing, neutron-doped germanium, radiation defects A method is proposed for annealing semiconductors under ultrasonic irradiation (f = 5–10 MHz, W < 10⁴ W/m²). Isochronous annealing of radiation defects was performed on model samples of neutron-doped G...