Учет механических напряжений в комбинированных диэлектриках для конденсаторов СБИС

• Date: 2003
• Main Authors: Pilipenko, V. A., Ponomar, V. N., Petlitskaya, T. V.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2003
• Subjects: комбинированный диэлектрик; конденсаторы СБИС; пентаоксид тантала
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2003.1.19
• Journal Title: Technology and design in electronic equipment

A variant of a combined capacitor dielectric based on tantalum pentoxide for VLSI capacitors is proposed. To find the optimal combination of layers in which the Si—SiO₂—Ta₂O₅ system does not undergo elastic mechanical deformation, a stress model was constructed. Calculations showed that when the thi...