Чутливий елемент багатофункціонального датчика для вимірювання температури, деформації та магнітного поля

Sensitive element of multifunctional sensor for measuring temperature, strain and magnetic field induction has been developed based on the studies of electrical conductivity and magnetoresistance of silicon and germanium microcrystals in the temperature range 4.2—70 K, strain ±1.5*10–3 rel....

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Bibliographic Details
Date:2017
Main Authors: Druzhinin, A. A., Khoverko, Yu. N., Kutrakov, A. P., Liakh-Kaguy, N. S., Yatsukhnenko, S. Yu.
Format: Article
Language:English
Published: PE "Politekhperiodika", Book and Journal Publishers 2017
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Online Access:https://www.tkea.com.ua/index.php/journal/article/view/TKEA2017.6.03
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Journal Title:Technology and design in electronic equipment

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Technology and design in electronic equipment
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Summary:Sensitive element of multifunctional sensor for measuring temperature, strain and magnetic field induction has been developed based on the studies of electrical conductivity and magnetoresistance of silicon and germanium microcrystals in the temperature range 4.2—70 K, strain ±1.5*10–3 rel.un. and magnetic fields of 0—14 T. The feature of the sensitive element is the using of the p- and n-type conductivity germanium microcrystals as mechanical and magnetic field sensors, respectively, and the p-type silicon microcrystal — as temperature sensor. That allows providing the compensation of temperature influence on piezoresistance and on sensitivity to the magnetic field.