Вуглецеві наностінки в автоемісійних катодах
The carbon nanowall (CNW) layers were grown from a gas mixture of hydrogen and methane, activated by a DC glow discharge, on Si substrates (Si/CNW layered structure). The second layer of CNW was grown either on the first layer (Si/CNW/CNW structure) or on Ni or NiO films deposited on the first CNW l...
Збережено в:
| Дата: | 2017 |
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| Автори: | , , , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
PE "Politekhperiodika", Book and Journal Publishers
2017
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| Теми: | |
| Онлайн доступ: | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2017.6.34 |
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| Назва журналу: | Technology and design in electronic equipment |
Репозитарії
Technology and design in electronic equipment| Резюме: | The carbon nanowall (CNW) layers were grown from a gas mixture of hydrogen and methane, activated by a DC glow discharge, on Si substrates (Si/CNW layered structure). The second layer of CNW was grown either on the first layer (Si/CNW/CNW structure) or on Ni or NiO films deposited on the first CNW layer (Si/CNW/Ni/CNW and Si/CNW/NiO/CNW structures). The composition and structure of the resulting layered structures were studied using scanning electron microscopy, Raman spectroscopy, and X-ray diffractometry. It was found that annealing of Si/CNW structure in vacuum, growing of the second CNW layer on Si/CNW, as well as deposition of Ni or NiO films prior to the growing of the second CNW layer improve functional properties of field emission cathodes based on the electron-emitting CNW layers. |
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