Вуглецеві наностінки в автоемісійних катодах

The carbon nanowall (CNW) layers were grown from a gas mixture of hydrogen and methane, activated by a DC glow discharge, on Si substrates (Si/CNW layered structure). The second layer of CNW was grown either on the first layer (Si/CNW/CNW structure) or on Ni or NiO films deposited on the first CNW l...

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Bibliographic Details
Date:2017
Main Authors: Belyanin, A. F., Borisov, V. V., Daghetsyan, S. A., Evlashin, S. A., Pilevsky, A. A., Samorodov, V. A.
Format: Article
Language:English
Published: PE "Politekhperiodika", Book and Journal Publishers 2017
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Online Access:https://www.tkea.com.ua/index.php/journal/article/view/TKEA2017.6.34
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Journal Title:Technology and design in electronic equipment

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Technology and design in electronic equipment
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Summary:The carbon nanowall (CNW) layers were grown from a gas mixture of hydrogen and methane, activated by a DC glow discharge, on Si substrates (Si/CNW layered structure). The second layer of CNW was grown either on the first layer (Si/CNW/CNW structure) or on Ni or NiO films deposited on the first CNW layer (Si/CNW/Ni/CNW and Si/CNW/NiO/CNW structures). The composition and structure of the resulting layered structures were studied using scanning electron microscopy, Raman spectroscopy, and X-ray diffractometry. It was found that annealing of Si/CNW structure in vacuum, growing of the second CNW layer on Si/CNW, as well as deposition of Ni or NiO films prior to the growing of the second CNW layer improve functional properties of field emission cathodes based on the electron-emitting CNW layers.