Датчик гидростатического давления на основе микрокристаллов антимонида галлия

Currently, silicon and germanium, the most common materials in the production of discrete semiconductor devices and integrated circuits, do not always meet all the requirements to the sensing elements of mechanical quantities sensors. Therefore, it is logical to research the properties of other semi...

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Дата:2015
Автори: Druzhinin, A. A., Maryamova, I. I., Kutrakov, A. P., Liakh-Kaguy, N. S.
Формат: Стаття
Мова:Ukrainian
Опубліковано: PE "Politekhperiodika", Book and Journal Publishers 2015
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Онлайн доступ:https://www.tkea.com.ua/index.php/journal/article/view/TKEA2015.4.19
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Назва журналу:Technology and design in electronic equipment

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Technology and design in electronic equipment
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spelling oai:tkea.com.ua:article-2712025-05-30T19:32:27Z Sensor of hydrostatic pressure based on gallium antimonide microcrystals Датчик гидростатического давления на основе микрокристаллов антимонида галлия Druzhinin, A. A. Maryamova, I. I. Kutrakov, A. P. Liakh-Kaguy, N. S. gallium antimonide sensor hydrostatic pressure антимонид галлия датчик гидростатическое давление Currently, silicon and germanium, the most common materials in the production of discrete semiconductor devices and integrated circuits, do not always meet all the requirements to the sensing elements of mechanical quantities sensors. Therefore, it is logical to research the properties of other semiconductor materials that could be used as sensing elements in such sensors. A3B5 semiconductor compounds seem promising for such purpose.The effect of hydrostatic pressure up to 5000 bar on the resistance of n-type antimonide gallium whiskers doped by Se or Te was studied. Coefficient of hydrostatic pressure for these crystals was determined, it equals Kh = (16.5–20.0).10–5 bar–1 at 20°C. Temperature dependence of resistance and coefficient Kh for these crystals in the temperature range ±60°c was studied. Design of the developed hydrostatic pressure sensor based on GaSb whiskers and its characteristics are presented. The possibility to decrease the temperature dependence of sensitive element resistance by mounting GaSb whiskers on the substrates fabricated from materials with different temperature coefficient of expansion was examined. It was shown that mounting of GaSb crystals on Cu substrate gives the optimal result, in this case the temperature coefficient decrease to 0.05%.°C–1, that leads to decrease of output temperature dependence. The main advantages of developed pressure sensor are: the simplified design in comparison with pressure sensors with strain gauges mounted on spring elements; the high sensitivity to pressure that is constant in the wide pressure range; the improvement of sensors metrological characteristics owing to hysteresis absence. The possible application fields of developed sensors are measuring of high and extremely high pressure, chemical and oil industries, measuring of pressure in oil bore-holes, investigation of explosive processes. Исследовано влияние гидростатического давления (до 5000 бар) на сопротивление нитевидных кристаллов антимонида галлия n-типа, легированных селеном или теллуром. Определена величина коэффициента гидростатического давления для этих кристаллов: КГ = (16,5 – 20,0).10–5 бар–1 при 20°С. Исследовано влияние температуры в диапазоне от –60 до +60 °С на сопротивление и коэффициент КГ этих кристаллов. Рассмотрена возможность уменьшения температурной зависимости сопротивления путем закрепления чувствительного элемента датчика на подложках из различных материалов с различным коэффициентом линейного термического расширения. Приведена конструкция разработанного датчика и его основные характеристики. PE "Politekhperiodika", Book and Journal Publishers 2015-08-25 Article Article Peer-reviewed Article application/pdf https://www.tkea.com.ua/index.php/journal/article/view/TKEA2015.4.19 10.15222/TKEA2015.4.19 Technology and design in electronic equipment; No. 4 (2015): Tekhnologiya i konstruirovanie v elektronnoi apparature; 19-23 Технологія та конструювання в електронній апаратурі; № 4 (2015): Технология и конструирование в электронной аппаратуре; 19-23 3083-6549 3083-6530 uk https://www.tkea.com.ua/index.php/journal/article/view/TKEA2015.4.19/239 Copyright (c) 2015 Druzhinin A. A., Maryamova I. I., Kutrakov A. P., Liakh-Kaguy N. S. http://creativecommons.org/licenses/by/4.0/
institution Technology and design in electronic equipment
baseUrl_str
datestamp_date 2025-05-30T19:32:27Z
collection OJS
language Ukrainian
topic антимонид галлия
датчик
гидростатическое давление
spellingShingle антимонид галлия
датчик
гидростатическое давление
Druzhinin, A. A.
Maryamova, I. I.
Kutrakov, A. P.
Liakh-Kaguy, N. S.
Датчик гидростатического давления на основе микрокристаллов антимонида галлия
topic_facet gallium antimonide
sensor
hydrostatic pressure
антимонид галлия
датчик
гидростатическое давление
format Article
author Druzhinin, A. A.
Maryamova, I. I.
Kutrakov, A. P.
Liakh-Kaguy, N. S.
author_facet Druzhinin, A. A.
Maryamova, I. I.
Kutrakov, A. P.
Liakh-Kaguy, N. S.
author_sort Druzhinin, A. A.
title Датчик гидростатического давления на основе микрокристаллов антимонида галлия
title_short Датчик гидростатического давления на основе микрокристаллов антимонида галлия
title_full Датчик гидростатического давления на основе микрокристаллов антимонида галлия
title_fullStr Датчик гидростатического давления на основе микрокристаллов антимонида галлия
title_full_unstemmed Датчик гидростатического давления на основе микрокристаллов антимонида галлия
title_sort датчик гидростатического давления на основе микрокристаллов антимонида галлия
title_alt Sensor of hydrostatic pressure based on gallium antimonide microcrystals
description Currently, silicon and germanium, the most common materials in the production of discrete semiconductor devices and integrated circuits, do not always meet all the requirements to the sensing elements of mechanical quantities sensors. Therefore, it is logical to research the properties of other semiconductor materials that could be used as sensing elements in such sensors. A3B5 semiconductor compounds seem promising for such purpose.The effect of hydrostatic pressure up to 5000 bar on the resistance of n-type antimonide gallium whiskers doped by Se or Te was studied. Coefficient of hydrostatic pressure for these crystals was determined, it equals Kh = (16.5–20.0).10–5 bar–1 at 20°C. Temperature dependence of resistance and coefficient Kh for these crystals in the temperature range ±60°c was studied. Design of the developed hydrostatic pressure sensor based on GaSb whiskers and its characteristics are presented. The possibility to decrease the temperature dependence of sensitive element resistance by mounting GaSb whiskers on the substrates fabricated from materials with different temperature coefficient of expansion was examined. It was shown that mounting of GaSb crystals on Cu substrate gives the optimal result, in this case the temperature coefficient decrease to 0.05%.°C–1, that leads to decrease of output temperature dependence. The main advantages of developed pressure sensor are: the simplified design in comparison with pressure sensors with strain gauges mounted on spring elements; the high sensitivity to pressure that is constant in the wide pressure range; the improvement of sensors metrological characteristics owing to hysteresis absence. The possible application fields of developed sensors are measuring of high and extremely high pressure, chemical and oil industries, measuring of pressure in oil bore-holes, investigation of explosive processes.
publisher PE "Politekhperiodika", Book and Journal Publishers
publishDate 2015
url https://www.tkea.com.ua/index.php/journal/article/view/TKEA2015.4.19
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